Effect of surface conduction on dielectric charging in RF MEMS capacitive switches

Z. Peng; D. Molinero; C. Palego; J. Hwang; C. Moody; A. Malczewski; B.W. Pillans

doi:10.1109/MWSYM.2010.5515661

Effect of surface conduction on dielectric charging in RF MEMS capacitive switches

Z. Peng
, D. Molinero
, C. Palego
, J. Hwang
, C. Moody
, A. Malczewski
, B.W. Pillans

Allbwn ymchwil: Cyfraniad at gynhadledd › Papur

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Charging of the surface of the dielectric in electrostatically actuated RF MEMS capacitive switches has been shown to be strongly affected by ambient humidity. We now hypothesize that the humidity affects surface charging through enhanced surface conduction. This is confirmed by the experimental results obtained on surface conductivity sensors and RF MEMS capacitive switches fabricated on the same die. The results suggest that it is critical to not only minimize the humidity in the switch package, but also optimize the surface chemistry of the switch dielectric to reduce its surface conductivity.

Iaith wreiddiol	Saesneg
Tudalennau	1250-1253
Dynodwyr Gwrthrych Digidol (DOIs)	https://doi.org/10.1109/MWSYM.2010.5515661
Statws	Cyhoeddwyd - 23 Mai 2010
Digwyddiad	Microwave Symposium Digest (MTT), 2010 IEEE MTT-S International, Anaheim, USA, 23-28 May 2010 - Hyd: 3 Ion 0001 → …

Cynhadledd

Cynhadledd	Microwave Symposium Digest (MTT), 2010 IEEE MTT-S International, Anaheim, USA, 23-28 May 2010
Cyfnod	3/01/01 → …

Mynediad at Ddogfen

10.1109/MWSYM.2010.5515661

Dyfynnu hyn

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title = "Effect of surface conduction on dielectric charging in RF MEMS capacitive switches",

abstract = "Charging of the surface of the dielectric in electrostatically actuated RF MEMS capacitive switches has been shown to be strongly affected by ambient humidity. We now hypothesize that the humidity affects surface charging through enhanced surface conduction. This is confirmed by the experimental results obtained on surface conductivity sensors and RF MEMS capacitive switches fabricated on the same die. The results suggest that it is critical to not only minimize the humidity in the switch package, but also optimize the surface chemistry of the switch dielectric to reduce its surface conductivity.",

author = "Z. Peng and D. Molinero and C. Palego and J. Hwang and C. Moody and A. Malczewski and B.W. Pillans",

year = "2010",

month = may,

day = "23",

doi = "10.1109/MWSYM.2010.5515661",

language = "English",

pages = "1250--1253",

note = "Microwave Symposium Digest (MTT), 2010 IEEE MTT-S International, Anaheim, USA, 23-28 May 2010 ; Conference date: 03-01-0001",

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TY - CONF

T1 - Effect of surface conduction on dielectric charging in RF MEMS capacitive switches

AU - Peng, Z.

AU - Molinero, D.

AU - Palego, C.

AU - Hwang, J.

AU - Moody, C.

AU - Malczewski, A.

AU - Pillans, B.W.

PY - 2010/5/23

Y1 - 2010/5/23

N2 - Charging of the surface of the dielectric in electrostatically actuated RF MEMS capacitive switches has been shown to be strongly affected by ambient humidity. We now hypothesize that the humidity affects surface charging through enhanced surface conduction. This is confirmed by the experimental results obtained on surface conductivity sensors and RF MEMS capacitive switches fabricated on the same die. The results suggest that it is critical to not only minimize the humidity in the switch package, but also optimize the surface chemistry of the switch dielectric to reduce its surface conductivity.

AB - Charging of the surface of the dielectric in electrostatically actuated RF MEMS capacitive switches has been shown to be strongly affected by ambient humidity. We now hypothesize that the humidity affects surface charging through enhanced surface conduction. This is confirmed by the experimental results obtained on surface conductivity sensors and RF MEMS capacitive switches fabricated on the same die. The results suggest that it is critical to not only minimize the humidity in the switch package, but also optimize the surface chemistry of the switch dielectric to reduce its surface conductivity.

U2 - 10.1109/MWSYM.2010.5515661

DO - 10.1109/MWSYM.2010.5515661

M3 - Paper

SP - 1250

EP - 1253

T2 - Microwave Symposium Digest (MTT), 2010 IEEE MTT-S International, Anaheim, USA, 23-28 May 2010

Y2 - 3 January 0001

ER -

Effect of surface conduction on dielectric charging in RF MEMS capacitive switches

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