@article{a8ecf6724dd147ada2560d6c19b6d5e1,
title = "Micro NiTi-Si cantilever with three stable positions.",
keywords = "ENGINEERING, ELECTRICAL \& ELECTRONIC, INSTRUMENTS \& INSTRUMENTATION",
author = "Q. Liu and W.M. Huang and Q.Y. Liu and L.M. He and J.H. Yeo",
year = "2004",
month = aug,
day = "20",
doi = "10.1016/j.sna.2004.02.027",
language = "English",
volume = "114",
pages = "118--122",
journal = "Sensors and Actuators A - Physical",
issn = "0924-4247",
publisher = "Elsevier BV",
number = "1",
}