@article{336a6cf5fbf348bf9df49cf20d689da0,
title = "Robustness of RF MEMS Capacitive Switches With Molybdenum Membranes",
author = "Cristiano Palego and Jie Deng and Zhen Peng and Subrata Halder and Hwang, \{James C. M.\} and Forehand, \{David I.\} and Derek Scarbrough and Goldsmith, \{Charles L.\} and Ian Johnston and Sampath, \{Suresh K.\} and Arindom Datta",
year = "2009",
month = nov,
day = "10",
doi = "10.1109/TMTT.2009.2033885",
language = "English",
volume = "57",
pages = "3262--3269",
journal = "IEEE Transactions on Microwave Theory and Techniques",
issn = "0018-9480",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "12",
}