Three-dimensional excimer laser micromachining using greyscale masks

Allbwn ymchwil: Cyfraniad at gyfnodolyn › Erthygl › adolygiad gan gymheiriaid

Iaith wreiddiol	Saesneg
Rhif yr erthygl	599
Cyfnodolyn	Journal of Micromechanics and Microengineering
Cyfrol	13
Dynodwyr Gwrthrych Digidol (DOIs)	https://doi.org/10.1088/0960-1317/13/5/310
Statws	Cyhoeddwyd - 2003

Mynediad at Ddogfen

Laser Micromachining Limited (LML)
Pethig, R. (Cyfranogwr), Burt, J. (Cyfranogwr), Talary, M. (Cyfranogwr), Tame, J. (Cyfranogwr), Hayden, C. (Cyfranogwr), Goater, A. (Cyfranogwr), Menachery, A. (Cyfranogwr) & Rizvi, N. (Cyfranogwr)
Effaith

Ffeil

@article{eb8699f9b27d4a50b737a976b42bd9a2,

title = "Three-dimensional excimer laser micromachining using greyscale masks",

author = "Christopher Hayden",

year = "2003",

doi = "10.1088/0960-1317/13/5/310",

language = "English",

volume = "13",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

publisher = "IOP Publishing Ltd.",

}