Project Details
| Short title | Light Actuated Microrobots |
|---|---|
| Status | Finished |
| Effective start/end date | 25/06/18 → 31/07/21 |
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Explore the research topics touched on by this project. These labels are generated based on the underlying awards/grants. Together they form a unique fingerprint.
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Hybrid Diamond/Silicon Suspended Integrated Photonic Platform using SF6 Isotropic Etching
Abdou, A., Richter, J., Thomas, E. L. H., Mandal, S., Ren, Z., Pedersen, R. H., Williams, O. A., Witzens, J., Nezhad, M. P. & Panduranga, P., 9 Apr 2020, 2019 IEEE 2nd British and Irish Conference on Optics and Photonics (BICOP). London: IEEEResearch output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
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Isotropic silicon etch characteristics in a purely inductively coupled SF6 plasma
Panduranga, P., Abdou, A., Pedersen, R. H., Ren, Z. & Nezhad, M., 30 Nov 2019, In: Journal of Vacuum Science and Technology B. 37, 6, 061206.Research output: Contribution to journal › Article › peer-review
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