An alternative method of fabricating sub-micron resolution masks using excimer laser ablation.

C.J. Hayden; J.C. Eijkel; C. Dalton

doi:10.1088/0960-1317/14/6/010

An alternative method of fabricating sub-micron resolution masks using excimer laser ablation.

C.J. Hayden
, J.C. Eijkel
, C. Dalton

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	826-831
Journal	Journal of Micromechanics and Microengineering
Volume	14
Issue number	6
DOIs	https://doi.org/10.1088/0960-1317/14/6/010
Publication status	Published - 1 Jun 2004

Keywords

ENGINEERING
ELECTRICAL & ELECTRONIC
INSTRUMENTS & INSTRUMENTATION
MATERIALS SCIENCE
MULTIDISCIPLINARY
MECHANICS
NANOSCIENCE & NANOTECHNOLOGY

Access to Document

10.1088/0960-1317/14/6/010

Cite this

@article{ddbc457dd1c247729c1d982b067ee387,

title = "An alternative method of fabricating sub-micron resolution masks using excimer laser ablation.",

keywords = "ENGINEERING, ELECTRICAL \& ELECTRONIC, INSTRUMENTS \& INSTRUMENTATION, MATERIALS SCIENCE, MULTIDISCIPLINARY, MECHANICS, NANOSCIENCE \& NANOTECHNOLOGY",

author = "C.J. Hayden and J.C. Eijkel and C. Dalton",

year = "2004",

month = jun,

day = "1",

doi = "10.1088/0960-1317/14/6/010",

language = "English",

volume = "14",

pages = "826--831",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

publisher = "IOP Publishing Ltd.",

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T1 - An alternative method of fabricating sub-micron resolution masks using excimer laser ablation.

AU - Hayden, C.J.

AU - Eijkel, J.C.

AU - Dalton, C.

PY - 2004/6/1

Y1 - 2004/6/1

KW - ENGINEERING

KW - ELECTRICAL & ELECTRONIC

KW - INSTRUMENTS & INSTRUMENTATION

KW - MATERIALS SCIENCE

KW - MULTIDISCIPLINARY

KW - MECHANICS

KW - NANOSCIENCE & NANOTECHNOLOGY

U2 - 10.1088/0960-1317/14/6/010

DO - 10.1088/0960-1317/14/6/010

M3 - Article

SN - 0960-1317

VL - 14

SP - 826

EP - 831

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 6

ER -