Analysis of Power Capacity of RF MEMS Capacitive Shunt Switches Fabricated on Silicon or Quartz Substrates

C. Palego, F. Solazzi, S. Halder, J. Hwang, P. Farinelli, R. Sorrentino, A. Faes, V. Mulloni, B. Margesin

Research output: Contribution to conference › Paper

Original language	English
DOIs	https://doi.org/www.memswave2010.unisalento.it/
Publication status	Published - 28 Jun 2010
Event	11th International Symposium on RF MEMS and RF Microsystems, Otranto, Italy, June 28-30, 2010 - Duration: 3 Jan 0001 → …

Conference	11th International Symposium on RF MEMS and RF Microsystems, Otranto, Italy, June 28-30, 2010
Period	3/01/01 → …

Access to Document

Palego, C., Solazzi, F., Halder, S., Hwang, J., Farinelli, P., Sorrentino, R., Faes, A., Mulloni, V., & Margesin, B. (2010). Analysis of Power Capacity of RF MEMS Capacitive Shunt Switches Fabricated on Silicon or Quartz Substrates. Paper presented at 11th International Symposium on RF MEMS and RF Microsystems, Otranto, Italy, June 28-30, 2010. https://doi.org/www.memswave2010.unisalento.it/

@conference{765629d3c93b4b52bd0665180001a1c4,

title = "Analysis of Power Capacity of RF MEMS Capacitive Shunt Switches Fabricated on Silicon or Quartz Substrates",

author = "C. Palego and F. Solazzi and S. Halder and J. Hwang and P. Farinelli and R. Sorrentino and A. Faes and V. Mulloni and B. Margesin",

year = "2010",

month = jun,

day = "28",

doi = "www.memswave2010.unisalento.it/",

language = "English",

note = "11th International Symposium on RF MEMS and RF Microsystems, Otranto, Italy, June 28-30, 2010 ; Conference date: 03-01-0001",

}

Palego, C, Solazzi, F, Halder, S, Hwang, J, Farinelli, P, Sorrentino, R, Faes, A, Mulloni, V & Margesin, B 2010, 'Analysis of Power Capacity of RF MEMS Capacitive Shunt Switches Fabricated on Silicon or Quartz Substrates', Paper presented at 11th International Symposium on RF MEMS and RF Microsystems, Otranto, Italy, June 28-30, 2010, 3/01/01. https://doi.org/www.memswave2010.unisalento.it/

TY - CONF

T1 - Analysis of Power Capacity of RF MEMS Capacitive Shunt Switches Fabricated on Silicon or Quartz Substrates

AU - Palego, C.

AU - Solazzi, F.

AU - Halder, S.

AU - Hwang, J.

AU - Farinelli, P.

AU - Sorrentino, R.

AU - Faes, A.

AU - Mulloni, V.

AU - Margesin, B.

PY - 2010/6/28

Y1 - 2010/6/28

U2 - www.memswave2010.unisalento.it/

DO - www.memswave2010.unisalento.it/

M3 - Paper

T2 - 11th International Symposium on RF MEMS and RF Microsystems, Otranto, Italy, June 28-30, 2010

Y2 - 3 January 0001

ER -