Effect of surface conduction on dielectric charging in RF MEMS capacitive switches

Z. Peng; D. Molinero; C. Palego; J. Hwang; C. Moody; A. Malczewski; B.W. Pillans

doi:10.1109/MWSYM.2010.5515661

Effect of surface conduction on dielectric charging in RF MEMS capacitive switches

Z. Peng, D. Molinero, C. Palego, J. Hwang, C. Moody, A. Malczewski, B.W. Pillans

Research output: Contribution to conference › Paper

Abstract

Charging of the surface of the dielectric in electrostatically actuated RF MEMS capacitive switches has been shown to be strongly affected by ambient humidity. We now hypothesize that the humidity affects surface charging through enhanced surface conduction. This is confirmed by the experimental results obtained on surface conductivity sensors and RF MEMS capacitive switches fabricated on the same die. The results suggest that it is critical to not only minimize the humidity in the switch package, but also optimize the surface chemistry of the switch dielectric to reduce its surface conductivity.

Original language	English
Pages	1250-1253
DOIs	https://doi.org/10.1109/MWSYM.2010.5515661
Publication status	Published - 23 May 2010
Event	Microwave Symposium Digest (MTT), 2010 IEEE MTT-S International, Anaheim, USA, 23-28 May 2010 - Duration: 3 Jan 0001 → …

Conference

Conference	Microwave Symposium Digest (MTT), 2010 IEEE MTT-S International, Anaheim, USA, 23-28 May 2010
Period	3/01/01 → …

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10.1109/MWSYM.2010.5515661

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title = "Effect of surface conduction on dielectric charging in RF MEMS capacitive switches",

abstract = "Charging of the surface of the dielectric in electrostatically actuated RF MEMS capacitive switches has been shown to be strongly affected by ambient humidity. We now hypothesize that the humidity affects surface charging through enhanced surface conduction. This is confirmed by the experimental results obtained on surface conductivity sensors and RF MEMS capacitive switches fabricated on the same die. The results suggest that it is critical to not only minimize the humidity in the switch package, but also optimize the surface chemistry of the switch dielectric to reduce its surface conductivity.",

author = "Z. Peng and D. Molinero and C. Palego and J. Hwang and C. Moody and A. Malczewski and B.W. Pillans",

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doi = "10.1109/MWSYM.2010.5515661",

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AU - Peng, Z.

AU - Molinero, D.

AU - Palego, C.

AU - Hwang, J.

AU - Moody, C.

AU - Malczewski, A.

AU - Pillans, B.W.

PY - 2010/5/23

Y1 - 2010/5/23

N2 - Charging of the surface of the dielectric in electrostatically actuated RF MEMS capacitive switches has been shown to be strongly affected by ambient humidity. We now hypothesize that the humidity affects surface charging through enhanced surface conduction. This is confirmed by the experimental results obtained on surface conductivity sensors and RF MEMS capacitive switches fabricated on the same die. The results suggest that it is critical to not only minimize the humidity in the switch package, but also optimize the surface chemistry of the switch dielectric to reduce its surface conductivity.

AB - Charging of the surface of the dielectric in electrostatically actuated RF MEMS capacitive switches has been shown to be strongly affected by ambient humidity. We now hypothesize that the humidity affects surface charging through enhanced surface conduction. This is confirmed by the experimental results obtained on surface conductivity sensors and RF MEMS capacitive switches fabricated on the same die. The results suggest that it is critical to not only minimize the humidity in the switch package, but also optimize the surface chemistry of the switch dielectric to reduce its surface conductivity.

U2 - 10.1109/MWSYM.2010.5515661

DO - 10.1109/MWSYM.2010.5515661

M3 - Paper

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EP - 1253

T2 - Microwave Symposium Digest (MTT), 2010 IEEE MTT-S International, Anaheim, USA, 23-28 May 2010

Y2 - 3 January 0001

ER -

Effect of surface conduction on dielectric charging in RF MEMS capacitive switches

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