Electro-thermal analysis of RF MEM capacitive switches for high-power applications

F. Solazzi; C. Palego; S. Halder; J. Hwang; A. Faes; V. Mulloni; B. Margesin; P. Farinelli; R. Sorrentino

doi:10.1109/ESSDERC.2010.5618174

Electro-thermal analysis of RF MEM capacitive switches for high-power applications

F. Solazzi, C. Palego, S. Halder, J. Hwang, A. Faes, V. Mulloni, B. Margesin, P. Farinelli, R. Sorrentino

Research output: Contribution to conference › Paper

Abstract

Self heating in electrostatically actuated RF MEM capacitive shunt switches is analyzed by coupled electrical and thermal simulations using three-dimensional finite-element analysis. The result shows that despite highly nonuniform current and temperature distributions, the self-heating effect can be approximated by lumped thermal resistances of the switch membrane and the substrate. Additionally, since the thermal resistance of thermally insulating substrates such as quartz is significant compared to that of the membrane, it is important to consider the heat transfer across both the membrane and the substrate.

Original language	English
Pages	468-471
DOIs	https://doi.org/10.1109/ESSDERC.2010.5618174
Publication status	Published - 14 Sept 2010
Event	Proceedings of the EuropeanSolid-State Device Research Conference (ESSDERC), Sevilla, 2010 - Duration: 3 Jan 0001 → …

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Conference	Proceedings of the EuropeanSolid-State Device Research Conference (ESSDERC), Sevilla, 2010
Period	3/01/01 → …

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10.1109/ESSDERC.2010.5618174

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Solazzi, F., Palego, C., Halder, S., Hwang, J., Faes, A., Mulloni, V., Margesin, B., Farinelli, P., & Sorrentino, R. (2010). Electro-thermal analysis of RF MEM capacitive switches for high-power applications. 468-471. Paper presented at Proceedings of the EuropeanSolid-State Device Research Conference (ESSDERC), Sevilla, 2010. https://doi.org/10.1109/ESSDERC.2010.5618174

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abstract = "Self heating in electrostatically actuated RF MEM capacitive shunt switches is analyzed by coupled electrical and thermal simulations using three-dimensional finite-element analysis. The result shows that despite highly nonuniform current and temperature distributions, the self-heating effect can be approximated by lumped thermal resistances of the switch membrane and the substrate. Additionally, since the thermal resistance of thermally insulating substrates such as quartz is significant compared to that of the membrane, it is important to consider the heat transfer across both the membrane and the substrate.",

author = "F. Solazzi and C. Palego and S. Halder and J. Hwang and A. Faes and V. Mulloni and B. Margesin and P. Farinelli and R. Sorrentino",

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doi = "10.1109/ESSDERC.2010.5618174",

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Solazzi, F, Palego, C, Halder, S, Hwang, J, Faes, A, Mulloni, V, Margesin, B, Farinelli, P & Sorrentino, R 2010, 'Electro-thermal analysis of RF MEM capacitive switches for high-power applications', Paper presented at Proceedings of the EuropeanSolid-State Device Research Conference (ESSDERC), Sevilla, 2010, 3/01/01 pp. 468-471. https://doi.org/10.1109/ESSDERC.2010.5618174

TY - CONF

T1 - Electro-thermal analysis of RF MEM capacitive switches for high-power applications

AU - Solazzi, F.

AU - Palego, C.

AU - Halder, S.

AU - Hwang, J.

AU - Faes, A.

AU - Mulloni, V.

AU - Margesin, B.

AU - Farinelli, P.

AU - Sorrentino, R.

PY - 2010/9/14

Y1 - 2010/9/14

N2 - Self heating in electrostatically actuated RF MEM capacitive shunt switches is analyzed by coupled electrical and thermal simulations using three-dimensional finite-element analysis. The result shows that despite highly nonuniform current and temperature distributions, the self-heating effect can be approximated by lumped thermal resistances of the switch membrane and the substrate. Additionally, since the thermal resistance of thermally insulating substrates such as quartz is significant compared to that of the membrane, it is important to consider the heat transfer across both the membrane and the substrate.

AB - Self heating in electrostatically actuated RF MEM capacitive shunt switches is analyzed by coupled electrical and thermal simulations using three-dimensional finite-element analysis. The result shows that despite highly nonuniform current and temperature distributions, the self-heating effect can be approximated by lumped thermal resistances of the switch membrane and the substrate. Additionally, since the thermal resistance of thermally insulating substrates such as quartz is significant compared to that of the membrane, it is important to consider the heat transfer across both the membrane and the substrate.

U2 - 10.1109/ESSDERC.2010.5618174

DO - 10.1109/ESSDERC.2010.5618174

M3 - Paper

SP - 468

EP - 471

T2 - Proceedings of the EuropeanSolid-State Device Research Conference (ESSDERC), Sevilla, 2010

Y2 - 3 January 0001

ER -

Electro-thermal analysis of RF MEM capacitive switches for high-power applications

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