Fabrication of complex 3D structures using Step and Flash Imprint Lithography (S-FIL).

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	853-855
Journal	Microelectronic Engineering
Volume	85
Issue number	5-6
DOIs	https://doi.org/10.1016/j.mee.2007.12.003
Publication status	Published - 1 May 2008

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title = "Fabrication of complex 3D structures using Step and Flash Imprint Lithography (S-FIL).",

author = "J.P. Kettle and J. Kettle and R.T. Hoyle and S. Dimov and R.M. Perks",

year = "2008",

month = may,

day = "1",

doi = "10.1016/j.mee.2007.12.003",

language = "English",

volume = "85",

pages = "853--855",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier BV",

number = "5-6",

}

TY - JOUR

T1 - Fabrication of complex 3D structures using Step and Flash Imprint Lithography (S-FIL).

AU - Kettle, J.P.

AU - Kettle, J.

AU - Hoyle, R.T.

AU - Dimov, S.

AU - Perks, R.M.

PY - 2008/5/1

Y1 - 2008/5/1

U2 - 10.1016/j.mee.2007.12.003

DO - 10.1016/j.mee.2007.12.003

M3 - Article

SN - 0167-9317

VL - 85

SP - 853

EP - 855

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 5-6

ER -