Focused ion beam-assisted technology in sub-picolitre micro-dispenser fabrication

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	1-8
Journal	Journal of Micromechanics and Microengineering
Volume	18
Issue number	7
DOIs	https://doi.org/10.1088/0960-1317/18/7/075021
Publication status	Published - 9 Jun 2008

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@article{4465aec6640248efad070431b9185a6d,

title = "Focused ion beam-assisted technology in sub-picolitre micro-dispenser fabrication",

author = "E. Campo and M.J. Lopez and D. Caballero and E.M. Campo and R. Perez-Castillejos and A. Errachid and J. Esteve and J.A. Plaza",

year = "2008",

month = jun,

day = "9",

doi = "10.1088/0960-1317/18/7/075021",

language = "English",

volume = "18",

pages = "1--8",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

publisher = "IOP Publishing Ltd.",

number = "7",

}

TY - JOUR

T1 - Focused ion beam-assisted technology in sub-picolitre micro-dispenser fabrication

AU - Campo, E.

AU - Lopez, M.J.

AU - Caballero, D.

AU - Campo, E.M.

AU - Perez-Castillejos, R.

AU - Errachid, A.

AU - Esteve, J.

AU - Plaza, J.A.

PY - 2008/6/9

Y1 - 2008/6/9

U2 - 10.1088/0960-1317/18/7/075021

DO - 10.1088/0960-1317/18/7/075021

M3 - Article

SN - 0960-1317

VL - 18

SP - 1

EP - 8

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 7

ER -