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Micro NiTi-Si cantilever with three stable positions.

  • Q. Liu
  • , W.M. Huang
  • , Q.Y. Liu
  • , L.M. He
  • , J.H. Yeo

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)118-122
JournalSensors and Actuators A - Physical
Volume114
Issue number1
DOIs
Publication statusPublished - 20 Aug 2004

Keywords

  • ENGINEERING
  • ELECTRICAL & ELECTRONIC
  • INSTRUMENTS & INSTRUMENTATION

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