Monolithically integrated waveguide-coupled silica microtoroids

M. Nezhad; J. Richter; M.P. Nezhad; J. Witzens

doi:10.1109/OECC.2015.7340232

Monolithically integrated waveguide-coupled silica microtoroids

M. Nezhad, J. Richter, M.P. Nezhad, J. Witzens

Research output: Contribution to conference › Paper

Abstract

We report on the design and fabrication of a new type of microtoroid high-Q silica resonators monolithically coupled to on-chip silicon nanowire waveguides. In order to enable monolithic waveguide coupling, the microtoroid geometry is inverted such that the resonator is formed by thermal reflow at the circumference of a hole etched in a suspended SiO2 membrane. This configuration is shown to be conducive to integration with a fully functional Silicon Photonics technology platform.

Original language	English
Pages	1-3
DOIs	https://doi.org/10.1109/OECC.2015.7340232
Publication status	Published - 28 Jul 2015
Event	Opto-Electronics and Communications Conference (OECC), Shanghai, 28 June - 2 July 2015 - Duration: 3 Jan 0001 → …

Conference

Conference	Opto-Electronics and Communications Conference (OECC), Shanghai, 28 June - 2 July 2015
Period	3/01/01 → …

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10.1109/OECC.2015.7340232

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@conference{a89c50a66acd432891fee87113182d25,

title = "Monolithically integrated waveguide-coupled silica microtoroids",

abstract = "We report on the design and fabrication of a new type of microtoroid high-Q silica resonators monolithically coupled to on-chip silicon nanowire waveguides. In order to enable monolithic waveguide coupling, the microtoroid geometry is inverted such that the resonator is formed by thermal reflow at the circumference of a hole etched in a suspended SiO2 membrane. This configuration is shown to be conducive to integration with a fully functional Silicon Photonics technology platform.",

author = "M. Nezhad and J. Richter and M.P. Nezhad and J. Witzens",

year = "2015",

month = jul,

day = "28",

doi = "10.1109/OECC.2015.7340232",

language = "English",

pages = "1--3",

note = "Opto-Electronics and Communications Conference (OECC), Shanghai, 28 June - 2 July 2015 ; Conference date: 03-01-0001",

}

TY - CONF

T1 - Monolithically integrated waveguide-coupled silica microtoroids

AU - Nezhad, M.

AU - Richter, J.

AU - Nezhad, M.P.

AU - Witzens, J.

PY - 2015/7/28

Y1 - 2015/7/28

N2 - We report on the design and fabrication of a new type of microtoroid high-Q silica resonators monolithically coupled to on-chip silicon nanowire waveguides. In order to enable monolithic waveguide coupling, the microtoroid geometry is inverted such that the resonator is formed by thermal reflow at the circumference of a hole etched in a suspended SiO2 membrane. This configuration is shown to be conducive to integration with a fully functional Silicon Photonics technology platform.

AB - We report on the design and fabrication of a new type of microtoroid high-Q silica resonators monolithically coupled to on-chip silicon nanowire waveguides. In order to enable monolithic waveguide coupling, the microtoroid geometry is inverted such that the resonator is formed by thermal reflow at the circumference of a hole etched in a suspended SiO2 membrane. This configuration is shown to be conducive to integration with a fully functional Silicon Photonics technology platform.

U2 - 10.1109/OECC.2015.7340232

DO - 10.1109/OECC.2015.7340232

M3 - Paper

SP - 1

EP - 3

T2 - Opto-Electronics and Communications Conference (OECC), Shanghai, 28 June - 2 July 2015

Y2 - 3 January 0001

ER -

Monolithically integrated waveguide-coupled silica microtoroids

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