Multiphysics modelling and simulation of dry laser cleaning of micro-slots with particle contaminants

Light could interact differently with thin-film contaminants and particle contaminates because of their different surface morphologies. In the case of dry laser cleaning of small transparent particles, it is well known that particles could function like mini-lenses, causing a localized near-field hot spot effect on the cleaning process. This paper looks into a special, yet important, phenomenon of dry laser cleaning of particles trapped in micro-sized slots. The effects of slot size, particle size and particle aggregate states in the cleaning process have been theoretically investigated, based on a coupled electromagnetic-thermal-mechanical multiphysics modelling and simulation approach. The study is important for the development and optimization of laser cleaning processes for contamination removal from cracks and slots.