Novel Ka-band phase shifters using MEMS capacitive switches

C. Palego; Z. Peng; J. Hwang; D. Scarbrough; C.L. Goldsmith

doi:10.1109/WAMICON.2010.5461851

Novel Ka-band phase shifters using MEMS capacitive switches

C. Palego, Z. Peng, J. Hwang, D. Scarbrough, C.L. Goldsmith

Research output: Contribution to conference › Paper

Abstract

his paper presents the design of a Ka-band phase shifter comprising a slow-wave structure that tightly wraps around three closely spaced MEMS capacitive switches. The switches are of proven design and reliability, except some switches have a gap in their stationary electrodes. This novel feature has negligible effect on electromechanical operation but provides another degree of freedom for simultaneous optimization of phase shift and impedance match. The design principle is validated through specially designed thin-film test structures. The results suggest that the present design is applicable to phase shifters of different sizes and resolutions with high performance, yield and reliability, but low cost and power consumption.

Original language	English
Pages	1-5
DOIs	https://doi.org/10.1109/WAMICON.2010.5461851
Publication status	Published - 12 Apr 2010
Event	IEEE 11th AnnualWireless and Microwave Technology Conference (WAMICON), April 2010, Melbourne - Duration: 3 Jan 0001 → …

Conference

Conference	IEEE 11th AnnualWireless and Microwave Technology Conference (WAMICON), April 2010, Melbourne
Period	3/01/01 → …

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10.1109/WAMICON.2010.5461851

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abstract = "his paper presents the design of a Ka-band phase shifter comprising a slow-wave structure that tightly wraps around three closely spaced MEMS capacitive switches. The switches are of proven design and reliability, except some switches have a gap in their stationary electrodes. This novel feature has negligible effect on electromechanical operation but provides another degree of freedom for simultaneous optimization of phase shift and impedance match. The design principle is validated through specially designed thin-film test structures. The results suggest that the present design is applicable to phase shifters of different sizes and resolutions with high performance, yield and reliability, but low cost and power consumption.",

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AU - Scarbrough, D.

AU - Goldsmith, C.L.

PY - 2010/4/12

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N2 - his paper presents the design of a Ka-band phase shifter comprising a slow-wave structure that tightly wraps around three closely spaced MEMS capacitive switches. The switches are of proven design and reliability, except some switches have a gap in their stationary electrodes. This novel feature has negligible effect on electromechanical operation but provides another degree of freedom for simultaneous optimization of phase shift and impedance match. The design principle is validated through specially designed thin-film test structures. The results suggest that the present design is applicable to phase shifters of different sizes and resolutions with high performance, yield and reliability, but low cost and power consumption.

AB - his paper presents the design of a Ka-band phase shifter comprising a slow-wave structure that tightly wraps around three closely spaced MEMS capacitive switches. The switches are of proven design and reliability, except some switches have a gap in their stationary electrodes. This novel feature has negligible effect on electromechanical operation but provides another degree of freedom for simultaneous optimization of phase shift and impedance match. The design principle is validated through specially designed thin-film test structures. The results suggest that the present design is applicable to phase shifters of different sizes and resolutions with high performance, yield and reliability, but low cost and power consumption.

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Novel Ka-band phase shifters using MEMS capacitive switches

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