Quantum-interferometric optical lithography: Towards arbitrary two-dimensional patterns.

P. Kok; A.N. Boto; D.S. Abrams; C.P. Williams; S.L. Braunstein; J.P. Dowling

doi:10.1103/PhysRevA.63.063407

Quantum-interferometric optical lithography: Towards arbitrary two-dimensional patterns.

P. Kok, A.N. Boto, D.S. Abrams, C.P. Williams, S.L. Braunstein, J.P. Dowling

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	063407
Journal	Physical Review A
Volume	63
Issue number	6
DOIs	https://doi.org/10.1103/PhysRevA.63.063407
Publication status	Published - 1 Jun 2001

Keywords

OPTICS
PHYSICS
ATOMIC
MOLECULAR & CHEMICAL

Access to Document

10.1103/PhysRevA.63.063407

Cite this

@article{7aeacc4cb62248e6b33a5f61d4b51db7,

title = "Quantum-interferometric optical lithography: Towards arbitrary two-dimensional patterns.",

keywords = "OPTICS, PHYSICS, ATOMIC, MOLECULAR \& CHEMICAL",

author = "P. Kok and A.N. Boto and D.S. Abrams and C.P. Williams and S.L. Braunstein and J.P. Dowling",

year = "2001",

month = jun,

day = "1",

doi = "10.1103/PhysRevA.63.063407",

language = "English",

volume = "63",

pages = "063407",

journal = "Physical Review A",

issn = "1050-2947",

publisher = "American Physical Society",

number = "6",

}

TY - JOUR

T1 - Quantum-interferometric optical lithography: Towards arbitrary two-dimensional patterns.

AU - Kok, P.

AU - Boto, A.N.

AU - Abrams, D.S.

AU - Williams, C.P.

AU - Braunstein, S.L.

AU - Dowling, J.P.

PY - 2001/6/1

Y1 - 2001/6/1

KW - OPTICS

KW - PHYSICS

KW - ATOMIC

KW - MOLECULAR & CHEMICAL

U2 - 10.1103/PhysRevA.63.063407

DO - 10.1103/PhysRevA.63.063407

M3 - Article

SN - 1050-2947

VL - 63

SP - 063407

JO - Physical Review A

JF - Physical Review A

IS - 6

ER -