RF MEMS control of planar microchamber for adaptive biosensing appliations

C. Palego; D. Molinero; S. Cunningham; A. Morris; M. Seth

doi:10.1109/EuMC.2014.6986616

RF MEMS control of planar microchamber for adaptive biosensing appliations

C. Palego, D. Molinero, S. Cunningham, A. Morris, M. Seth

Research output: Contribution to conference › Paper

Abstract

Integration of radiofrequency micro-electromechanical (RF MEMS) tuning modules into a tested planar microchamber for agile biosensing pursposes is investigated. It is found that present MEMS chips enable enhancement of the achievable sensitivity in common sensing scenarios and without adding to technological complexity, although over a relatively narrow frequency range. Dedicated RF MEMS modules with higher capacitive resolution can be prospectively employed for even more flexible performance.

Original language	English
Pages	1040-1043
DOIs	https://doi.org/10.1109/EuMC.2014.6986616
Publication status	Published - 6 Oct 2014
Event	IEEE European Microwave Conference, Rome, Italy, October 2014 - Duration: 3 Jan 0001 → …

Conference

Conference	IEEE European Microwave Conference, Rome, Italy, October 2014
Period	3/01/01 → …

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10.1109/EuMC.2014.6986616

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title = "RF MEMS control of planar microchamber for adaptive biosensing appliations",

abstract = "Integration of radiofrequency micro-electromechanical (RF MEMS) tuning modules into a tested planar microchamber for agile biosensing pursposes is investigated. It is found that present MEMS chips enable enhancement of the achievable sensitivity in common sensing scenarios and without adding to technological complexity, although over a relatively narrow frequency range. Dedicated RF MEMS modules with higher capacitive resolution can be prospectively employed for even more flexible performance.",

author = "C. Palego and D. Molinero and S. Cunningham and A. Morris and M. Seth",

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AU - Palego, C.

AU - Molinero, D.

AU - Cunningham, S.

AU - Morris, A.

AU - Seth, M.

PY - 2014/10/6

Y1 - 2014/10/6

N2 - Integration of radiofrequency micro-electromechanical (RF MEMS) tuning modules into a tested planar microchamber for agile biosensing pursposes is investigated. It is found that present MEMS chips enable enhancement of the achievable sensitivity in common sensing scenarios and without adding to technological complexity, although over a relatively narrow frequency range. Dedicated RF MEMS modules with higher capacitive resolution can be prospectively employed for even more flexible performance.

AB - Integration of radiofrequency micro-electromechanical (RF MEMS) tuning modules into a tested planar microchamber for agile biosensing pursposes is investigated. It is found that present MEMS chips enable enhancement of the achievable sensitivity in common sensing scenarios and without adding to technological complexity, although over a relatively narrow frequency range. Dedicated RF MEMS modules with higher capacitive resolution can be prospectively employed for even more flexible performance.

U2 - 10.1109/EuMC.2014.6986616

DO - 10.1109/EuMC.2014.6986616

M3 - Paper

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EP - 1043

T2 - IEEE European Microwave Conference, Rome, Italy, October 2014

Y2 - 3 January 0001

ER -

RF MEMS control of planar microchamber for adaptive biosensing appliations

Abstract

Conference

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