Robustness of RF MEMS Capacitive Switches With Molybdenum Membranes

Cristiano Palego, Jie Deng, Zhen Peng, Subrata Halder, James C. M. Hwang, David I. Forehand, Derek Scarbrough, Charles L. Goldsmith, Ian Johnston, Suresh K. Sampath, Arindom Datta

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)3262-3269
JournalIEEE Transactions on Microwave Theory and Techniques
Volume57
Issue number12
DOIs
Publication statusPublished - 10 Nov 2009
Externally publishedYes

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