Original language | English |
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Pages (from-to) | 3262-3269 |
Journal | IEEE Transactions on Microwave Theory and Techniques |
Volume | 57 |
Issue number | 12 |
DOIs | |
Publication status | Published - 10 Nov 2009 |
Externally published | Yes |
Robustness of RF MEMS Capacitive Switches With Molybdenum Membranes
Cristiano Palego, Jie Deng, Zhen Peng, Subrata Halder, James C. M. Hwang, David I. Forehand, Derek Scarbrough, Charles L. Goldsmith, Ian Johnston, Suresh K. Sampath, Arindom Datta
Research output: Contribution to journal › Article › peer-review