Robustness of RF MEMS Capacitive Switches With Molybdenum Membranes

Cristiano Palego; Jie Deng; Zhen Peng; Subrata Halder; James C. M. Hwang; David I. Forehand; Derek Scarbrough; Charles L. Goldsmith; Ian Johnston; Suresh K.  Sampath; Arindom Datta

doi:10.1109/TMTT.2009.2033885

Robustness of RF MEMS Capacitive Switches With Molybdenum Membranes

Cristiano Palego
, Jie Deng
, Zhen Peng
, Subrata Halder
, James C. M. Hwang
, David I. Forehand
, Derek Scarbrough
, Charles L. Goldsmith
, Ian Johnston
, Suresh K. Sampath
, Arindom Datta

Lehigh University, Bethlehem, PA
MEMtronics Corporation, Richardson, TX
Innovative Micro Technology

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	3262-3269
Journal	IEEE Transactions on Microwave Theory and Techniques
Volume	57
Issue number	12
DOIs	https://doi.org/10.1109/TMTT.2009.2033885
Publication status	Published - 10 Nov 2009
Externally published	Yes

Access to Document

10.1109/TMTT.2009.2033885

Cite this

@article{336a6cf5fbf348bf9df49cf20d689da0,

title = "Robustness of RF MEMS Capacitive Switches With Molybdenum Membranes",

author = "Cristiano Palego and Jie Deng and Zhen Peng and Subrata Halder and Hwang, \{James C. M.\} and Forehand, \{David I.\} and Derek Scarbrough and Goldsmith, \{Charles L.\} and Ian Johnston and Sampath, \{Suresh K.\} and Arindom Datta",

year = "2009",

month = nov,

day = "10",

doi = "10.1109/TMTT.2009.2033885",

language = "English",

volume = "57",

pages = "3262--3269",

journal = "IEEE Transactions on Microwave Theory and Techniques",

issn = "0018-9480",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "12",

}

TY - JOUR

T1 - Robustness of RF MEMS Capacitive Switches With Molybdenum Membranes

AU - Palego, Cristiano

AU - Deng, Jie

AU - Peng, Zhen

AU - Halder, Subrata

AU - Hwang, James C. M.

AU - Forehand, David I.

AU - Scarbrough, Derek

AU - Goldsmith, Charles L.

AU - Johnston, Ian

AU - Sampath, Suresh K.

AU - Datta, Arindom

PY - 2009/11/10

Y1 - 2009/11/10

U2 - 10.1109/TMTT.2009.2033885

DO - 10.1109/TMTT.2009.2033885

M3 - Article

SN - 0018-9480

VL - 57

SP - 3262

EP - 3269

JO - IEEE Transactions on Microwave Theory and Techniques

JF - IEEE Transactions on Microwave Theory and Techniques

IS - 12

ER -