Three-dimensional all-dielectric metamaterial solid immersion lens for subwavelength imaging at visible frequencies

Although all-dielectric metamaterials offer a low-loss alternative to current metal-based metamaterials to manipulate light at the nanoscale and may have important applications, very few have been reported to date owing to the current nanofabrication technologies. We develop a new “nano–solid-fluid assembly” method using 15-nm TiO2 nanoparticles as building blocks to fabricate the first three-dimensional (3D) all-dielectric metamaterial at visible frequencies. Because of its optical transparency, high refractive index, and deep-subwavelength structures, this 3D all-dielectric metamaterial-based solid immersion lens (mSIL) can produce a sharp image with a super-resolution of at least 45 nm under a white-light optical microscope, significantly exceeding the classical diffraction limit and previous near-field imaging techniques. Theoretical analysis reveals that electric field enhancement can be formed between contacting TiO2 nanoparticles, which causes effective confinement and propagation of visible light at the deep-subwavelength scale. This endows the mSIL with unusual abilities to illuminate object surfaces with large-area nanoscale near-field evanescent spots and to collect and convert the evanescent information into propagating waves. Our all-dielectric metamaterial design strategy demonstrates the potential to develop low-loss nanophotonic devices at visible frequencies.