Versatile micropipette technology based on deep reactive ion etching and anodic bonding for biological applications

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	1-10
Journal	Journal of Micromechanics and Microengineering
Volume	19
Issue number	10
DOIs	https://doi.org/10.1088/0960-1317/19/10/105013
Publication status	Published - 17 Sept 2009

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title = "Versatile micropipette technology based on deep reactive ion etching and anodic bonding for biological applications",

author = "E. Campo and M.J. Lopez-Martinez and E.M. Campo and D. Caballero and E. Fernandez and A. Errachid and J. Esteve and J.A. Plaza",

year = "2009",

month = sep,

day = "17",

doi = "10.1088/0960-1317/19/10/105013",

language = "English",

volume = "19",

pages = "1--10",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

publisher = "IOP Publishing Ltd.",

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}

TY - JOUR

T1 - Versatile micropipette technology based on deep reactive ion etching and anodic bonding for biological applications

AU - Campo, E.

AU - Lopez-Martinez, M.J.

AU - Campo, E.M.

AU - Caballero, D.

AU - Fernandez, E.

AU - Errachid, A.

AU - Esteve, J.

AU - Plaza, J.A.

PY - 2009/9/17

Y1 - 2009/9/17

U2 - 10.1088/0960-1317/19/10/105013

DO - 10.1088/0960-1317/19/10/105013

M3 - Article

SN - 0960-1317

VL - 19

SP - 1

EP - 10

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 10

ER -