This paper proposes a systematic synthesis method-
ology for a combined feedforward/feedback architecture to
control multiple-input, multiple-output nanopositioning systems.
Coprime factorization of the open loop model is used to design the
reference and feedforward filters of the proposed control scheme
to achieve enhanced tracking, eliminate the limitation of the feed-
back on tracking performance, and increase the bandwidth of the
closed-loop system. Two types of coprime factorization, namely
inner–outer factorization and normalized coprime factorization
are discussed. A case study based on hardware experiment
is presented to analyze the proposed control architecture and
demonstrate its superiority over feedback-only control. In addi-
tion to the no-load case, the performance of the system is also
tested with loads on the nanopositioning stage