TY - JOUR

T1 - Near-field measurement of amplitude and phase in silicon waveguides with liquid cladding

AU - Ayache, Maurice

AU - Nezhad, Maziar P.

AU - Zamek, Steve

AU - Abashin, Maxim

AU - Fainman, Yeshaiahu

PY - 2011/5/15

Y1 - 2011/5/15

N2 - Heterodyne near-field scanning optical microscopy (H-NSOM) has proven useful as a tool for characterization of both amplitude and phase of on-chip photonic devices in air, but it has previously been unable to characterize devices with a dielectric overcladding, which is commonly used in practice for such devices. Here we demonstrate H-NSOM of a silicon waveguide with a liquid cladding emulating the solid dielectric. This technique allows characterization of practical devices with realistic refractive index profiles. Fourier analysis is used to estimate the effective refractive index of the mode from the measured data, showing an index shift of 0.08 from air to water cladding, which is seen to correspond well to simulations.

AB - Heterodyne near-field scanning optical microscopy (H-NSOM) has proven useful as a tool for characterization of both amplitude and phase of on-chip photonic devices in air, but it has previously been unable to characterize devices with a dielectric overcladding, which is commonly used in practice for such devices. Here we demonstrate H-NSOM of a silicon waveguide with a liquid cladding emulating the solid dielectric. This technique allows characterization of practical devices with realistic refractive index profiles. Fourier analysis is used to estimate the effective refractive index of the mode from the measured data, showing an index shift of 0.08 from air to water cladding, which is seen to correspond well to simulations.

U2 - 10.1364/OL.36.001869

DO - 10.1364/OL.36.001869

M3 - Article

VL - 36

SP - 1869

EP - 1871

JO - Optics Letters

JF - Optics Letters

SN - 0146-9592

IS - 10

ER -