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Compact RF large-signal model for MEMS capacitive switches

Research output: Contribution to conference › Paper

Standard Standard

Compact RF large-signal model for MEMS capacitive switches. / Halder, S.; Palego, C.; Hwant, J. et al.
2010. 421-424 Paper presented at Microwave Symposium Digest (MTT), 2010 IEEE MTT-S International, Anaheim, USA, 23-28 May 2010.

Research output: Contribution to conference › Paper

HarvardHarvard

Halder, S, Palego, C, Hwant, J & Goldsmith, CL 2010, 'Compact RF large-signal model for MEMS capacitive switches', Paper presented at Microwave Symposium Digest (MTT), 2010 IEEE MTT-S International, Anaheim, USA, 23-28 May 2010, 3/01/01 pp. 421-424. https://doi.org/10.1109/MWSYM.2010.5515520

APA

Halder, S., Palego, C., Hwant, J., & Goldsmith, C. L. (2010). Compact RF large-signal model for MEMS capacitive switches. 421-424. Paper presented at Microwave Symposium Digest (MTT), 2010 IEEE MTT-S International, Anaheim, USA, 23-28 May 2010. https://doi.org/10.1109/MWSYM.2010.5515520

CBE

Halder S, Palego C, Hwant J, Goldsmith CL. 2010. Compact RF large-signal model for MEMS capacitive switches. Paper presented at Microwave Symposium Digest (MTT), 2010 IEEE MTT-S International, Anaheim, USA, 23-28 May 2010. https://doi.org/10.1109/MWSYM.2010.5515520

MLA

Halder, S. et al. Compact RF large-signal model for MEMS capacitive switches. Microwave Symposium Digest (MTT), 2010 IEEE MTT-S International, Anaheim, USA, 23-28 May 2010, 03 Jan 0001, Paper, 2010. https://doi.org/10.1109/MWSYM.2010.5515520

VancouverVancouver

Halder S, Palego C, Hwant J, Goldsmith CL. Compact RF large-signal model for MEMS capacitive switches. 2010. Paper presented at Microwave Symposium Digest (MTT), 2010 IEEE MTT-S International, Anaheim, USA, 23-28 May 2010. doi: 10.1109/MWSYM.2010.5515520

Author

Halder, S. ; Palego, C. ; Hwant, J. et al. / Compact RF large-signal model for MEMS capacitive switches. Paper presented at Microwave Symposium Digest (MTT), 2010 IEEE MTT-S International, Anaheim, USA, 23-28 May 2010.

RIS

TY - CONF

T1 - Compact RF large-signal model for MEMS capacitive switches

AU - Halder, S.

AU - Palego, C.

AU - Hwant, J.

AU - Goldsmith, C.L.

PY - 2010/5/23

Y1 - 2010/5/23

N2 - Last year, we reported on a SPICE-based compact RF small-signal electromechanical model for electrostatically actuated MEMS capacitive shunt switches with movable membranes. We now report on the enhancement of the model to include electrothermal and thermomechanical effects so that the model is applicable under large-signal RF conditions. Specifically, a thermal subcircuit is added to account for the temperature rise in the switch membrane as a function of the dissipated RF power. In turn, the temperature rise is used to evaluate the decrease in the membrane spring constant. These enhancements allow the present multiphysics model to simulate the coupled self-biasing and self-heating effects under RF large signals and to predict the power-handling capacity of MEMS capacitive switches. Additionally, the model has been coded in Verilog, making it portable between different circuit simulation environments.

AB - Last year, we reported on a SPICE-based compact RF small-signal electromechanical model for electrostatically actuated MEMS capacitive shunt switches with movable membranes. We now report on the enhancement of the model to include electrothermal and thermomechanical effects so that the model is applicable under large-signal RF conditions. Specifically, a thermal subcircuit is added to account for the temperature rise in the switch membrane as a function of the dissipated RF power. In turn, the temperature rise is used to evaluate the decrease in the membrane spring constant. These enhancements allow the present multiphysics model to simulate the coupled self-biasing and self-heating effects under RF large signals and to predict the power-handling capacity of MEMS capacitive switches. Additionally, the model has been coded in Verilog, making it portable between different circuit simulation environments.

U2 - 10.1109/MWSYM.2010.5515520

DO - 10.1109/MWSYM.2010.5515520

M3 - Paper

SP - 421

EP - 424

T2 - Microwave Symposium Digest (MTT), 2010 IEEE MTT-S International, Anaheim, USA, 23-28 May 2010

Y2 - 3 January 0001

ER -