TY - JOUR

T1 - Enhanced Tracking for Nanopositioning Systems Using Feedforward/Feedback Multivariable Control Design

AU - Kara-Mohamed, M.

AU - Heath, W.P.

AU - Lanzon, A.

PY - 2015/5/1

Y1 - 2015/5/1

N2 - This paper proposes a systematic synthesis method-ology for a combined feedforward/feedback architecture tocontrol multiple-input, multiple-output nanopositioning systems.Coprime factorization of the open loop model is used to design thereference and feedforward filters of the proposed control schemeto achieve enhanced tracking, eliminate the limitation of the feed-back on tracking performance, and increase the bandwidth of theclosed-loop system. Two types of coprime factorization, namelyinner–outer factorization and normalized coprime factorizationare discussed. A case study based on hardware experimentis presented to analyze the proposed control architecture anddemonstrate its superiority over feedback-only control. In addi-tion to the no-load case, the performance of the system is alsotested with loads on the nanopositioning stage

AB - This paper proposes a systematic synthesis method-ology for a combined feedforward/feedback architecture tocontrol multiple-input, multiple-output nanopositioning systems.Coprime factorization of the open loop model is used to design thereference and feedforward filters of the proposed control schemeto achieve enhanced tracking, eliminate the limitation of the feed-back on tracking performance, and increase the bandwidth of theclosed-loop system. Two types of coprime factorization, namelyinner–outer factorization and normalized coprime factorizationare discussed. A case study based on hardware experimentis presented to analyze the proposed control architecture anddemonstrate its superiority over feedback-only control. In addi-tion to the no-load case, the performance of the system is alsotested with loads on the nanopositioning stage

U2 - 0.1109/TCST.2014.2360498

DO - 0.1109/TCST.2014.2360498

M3 - Erthygl

VL - 23

SP - 1003

EP - 1013

JO - IEEE Transactions on Control Systems Technology

JF - IEEE Transactions on Control Systems Technology

IS - 3

ER -