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Intermodulation distortion of actuated MEMS capacitive switches

Research output: Contribution to conference › Paper

Standard Standard

Intermodulation distortion of actuated MEMS capacitive switches. / Palego, C.; Luo, X.; Ning, Y. et al.
2013. 1-3 Paper presented at Microwave Measurement Conference (ARFTG), 2013 81st ARFTG, Seattle, USA, June 2013.

Research output: Contribution to conference › Paper

HarvardHarvard

Palego, C, Luo, X, Ning, Y, Molinero, D, Palego. C., NV, Hwang, JC & Goldsmith, CL 2013, 'Intermodulation distortion of actuated MEMS capacitive switches', Paper presented at Microwave Measurement Conference (ARFTG), 2013 81st ARFTG, Seattle, USA, June 2013, 3/01/01 pp. 1-3. https://doi.org/10.1109/ARFTG.2013.6579053

APA

Palego, C., Luo, X., Ning, Y., Molinero, D., Palego. C., N. V., Hwang, J. C., & Goldsmith, C. L. (2013). Intermodulation distortion of actuated MEMS capacitive switches. 1-3. Paper presented at Microwave Measurement Conference (ARFTG), 2013 81st ARFTG, Seattle, USA, June 2013. https://doi.org/10.1109/ARFTG.2013.6579053

CBE

Palego C, Luo X, Ning Y, Molinero D, Palego. C. NV, Hwang JC, Goldsmith CL. 2013. Intermodulation distortion of actuated MEMS capacitive switches. Paper presented at Microwave Measurement Conference (ARFTG), 2013 81st ARFTG, Seattle, USA, June 2013. https://doi.org/10.1109/ARFTG.2013.6579053

MLA

Palego, C. et al. Intermodulation distortion of actuated MEMS capacitive switches. Microwave Measurement Conference (ARFTG), 2013 81st ARFTG, Seattle, USA, June 2013, 03 Jan 0001, Paper, 2013. https://doi.org/10.1109/ARFTG.2013.6579053

VancouverVancouver

Palego C, Luo X, Ning Y, Molinero D, Palego. C. NV, Hwang JC et al.. Intermodulation distortion of actuated MEMS capacitive switches. 2013. Paper presented at Microwave Measurement Conference (ARFTG), 2013 81st ARFTG, Seattle, USA, June 2013. doi: 10.1109/ARFTG.2013.6579053

Author

Palego, C. ; Luo, X. ; Ning, Y. et al. / Intermodulation distortion of actuated MEMS capacitive switches. Paper presented at Microwave Measurement Conference (ARFTG), 2013 81st ARFTG, Seattle, USA, June 2013.

RIS

TY - CONF

T1 - Intermodulation distortion of actuated MEMS capacitive switches

AU - Palego, C.

AU - Luo, X.

AU - Ning, Y.

AU - Molinero, D.

AU - Palego. C., [No Value]

AU - Hwang, J.C.

AU - Goldsmith, C.L.

PY - 2013/6/7

Y1 - 2013/6/7

N2 - For the first time, intermodulation distortion of micro-electromechanical capacitive switches in the actuated state was analyzed both theoretically and experimentally. The distortion, although higher than that of switches in the suspended state, was found to decrease with increasing bias voltage but to depend weakly on modulation frequencies between 55 kHz and 1.1 MHz. This dependence could be explained by the orders-of-magnitude increase of the spring constant when the switches were actuated. Additionally, the analysis suggested that increasing the spring constant and decreasing the contact roughness could improve the linearity of actuated switches. These results are critical to micro-electromechanical capacitive switches used in tuners, filters, phase shifters, etc. where the linearity of both suspended and actuated states are critical.

AB - For the first time, intermodulation distortion of micro-electromechanical capacitive switches in the actuated state was analyzed both theoretically and experimentally. The distortion, although higher than that of switches in the suspended state, was found to decrease with increasing bias voltage but to depend weakly on modulation frequencies between 55 kHz and 1.1 MHz. This dependence could be explained by the orders-of-magnitude increase of the spring constant when the switches were actuated. Additionally, the analysis suggested that increasing the spring constant and decreasing the contact roughness could improve the linearity of actuated switches. These results are critical to micro-electromechanical capacitive switches used in tuners, filters, phase shifters, etc. where the linearity of both suspended and actuated states are critical.

U2 - 10.1109/ARFTG.2013.6579053

DO - 10.1109/ARFTG.2013.6579053

M3 - Paper

SP - 1

EP - 3

T2 - Microwave Measurement Conference (ARFTG), 2013 81st ARFTG, Seattle, USA, June 2013

Y2 - 3 January 0001

ER -