Micro NiTi-Si cantilever with three stable positions.
Research output: Contribution to journal › Article › peer-review
Electronic versions
DOI
Keywords
- ENGINEERING, ELECTRICAL & ELECTRONIC, INSTRUMENTS & INSTRUMENTATION
| Original language | English |
|---|---|
| Pages (from-to) | 118-122 |
| Journal | Sensors and Actuators A - Physical |
| Volume | 114 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 20 Aug 2004 |