Novel Ka-band phase shifters using MEMS capacitive switches

Research output: Contribution to conferencePaper

Standard Standard

Novel Ka-band phase shifters using MEMS capacitive switches. / Palego, C.; Peng, Z.; Hwang, J.; Scarbrough, D.; Goldsmith, C.L.

2010. 1-5 Paper presented at IEEE 11th AnnualWireless and Microwave Technology Conference (WAMICON), April 2010, Melbourne, .

Research output: Contribution to conferencePaper

HarvardHarvard

Palego, C, Peng, Z, Hwang, J, Scarbrough, D & Goldsmith, CL 2010, 'Novel Ka-band phase shifters using MEMS capacitive switches' Paper presented at IEEE 11th AnnualWireless and Microwave Technology Conference (WAMICON), April 2010, Melbourne, 3/01/01, pp. 1-5. https://doi.org/10.1109/WAMICON.2010.5461851

APA

Palego, C., Peng, Z., Hwang, J., Scarbrough, D., & Goldsmith, C. L. (2010). Novel Ka-band phase shifters using MEMS capacitive switches. 1-5. Paper presented at IEEE 11th AnnualWireless and Microwave Technology Conference (WAMICON), April 2010, Melbourne, . https://doi.org/10.1109/WAMICON.2010.5461851

CBE

Palego C, Peng Z, Hwang J, Scarbrough D, Goldsmith CL. 2010. Novel Ka-band phase shifters using MEMS capacitive switches. Paper presented at IEEE 11th AnnualWireless and Microwave Technology Conference (WAMICON), April 2010, Melbourne, . https://doi.org/10.1109/WAMICON.2010.5461851

MLA

VancouverVancouver

Palego C, Peng Z, Hwang J, Scarbrough D, Goldsmith CL. Novel Ka-band phase shifters using MEMS capacitive switches. 2010. Paper presented at IEEE 11th AnnualWireless and Microwave Technology Conference (WAMICON), April 2010, Melbourne, . https://doi.org/10.1109/WAMICON.2010.5461851

Author

Palego, C. ; Peng, Z. ; Hwang, J. ; Scarbrough, D. ; Goldsmith, C.L. / Novel Ka-band phase shifters using MEMS capacitive switches. Paper presented at IEEE 11th AnnualWireless and Microwave Technology Conference (WAMICON), April 2010, Melbourne, .

RIS

TY - CONF

T1 - Novel Ka-band phase shifters using MEMS capacitive switches

AU - Palego, C.

AU - Peng, Z.

AU - Hwang, J.

AU - Scarbrough, D.

AU - Goldsmith, C.L.

PY - 2010/4/12

Y1 - 2010/4/12

N2 - his paper presents the design of a Ka-band phase shifter comprising a slow-wave structure that tightly wraps around three closely spaced MEMS capacitive switches. The switches are of proven design and reliability, except some switches have a gap in their stationary electrodes. This novel feature has negligible effect on electromechanical operation but provides another degree of freedom for simultaneous optimization of phase shift and impedance match. The design principle is validated through specially designed thin-film test structures. The results suggest that the present design is applicable to phase shifters of different sizes and resolutions with high performance, yield and reliability, but low cost and power consumption.

AB - his paper presents the design of a Ka-band phase shifter comprising a slow-wave structure that tightly wraps around three closely spaced MEMS capacitive switches. The switches are of proven design and reliability, except some switches have a gap in their stationary electrodes. This novel feature has negligible effect on electromechanical operation but provides another degree of freedom for simultaneous optimization of phase shift and impedance match. The design principle is validated through specially designed thin-film test structures. The results suggest that the present design is applicable to phase shifters of different sizes and resolutions with high performance, yield and reliability, but low cost and power consumption.

U2 - 10.1109/WAMICON.2010.5461851

DO - 10.1109/WAMICON.2010.5461851

M3 - Paper

SP - 1

EP - 5

ER -