TY - JOUR

T1 - Ti-Zr-Nb-(V) refractory alloy coatings deposited by high-power impulse magnetron sputtering: Structure, mechanical properties, oxidation resistance, and thermal stability

AU - Fraile, Alberto

AU - Cavaleiro, D.

AU - Bondarev, A.

AU - Middleburgh, Simon

AU - Lee, Bill

AU - Fernandes, F.

PY - 2024/9/11

Y1 - 2024/9/11

N2 - A series of TiZrNb(V) high entropy alloy-based metallic coatings have been deposited using high-power impulse magnetron sputtering (HiPIMS), with variable V concentrations and constant ratios among the other metals. The coatings were analyzed regarding their composition, surface and cross-sectional morphologies, microstructure, roughness, mechanical properties, oxidation resistance, and thermal stability. The structure of the deposited coatings reveals a transition from the bcc crystal structure to an amorphous phase as the V concentration increases. The addition of V also led to a decrease in roughness Ra and an improvement in adhesion, while it did not affect hardness, which remained at ∼10–11 GPa for all samples. Annealing under a protective atmosphere at 400 °C caused structural ordering, which was followed by an increase in mechanical properties. The purpose of the present paper is, therefore, to present a study on the deposition of TiZrNb coatings with increasing V concentration prepared by HiPIMS and to understand the role of V concentration on their structure, chemical composition, mechanical properties, and oxidation resistance. Comparison of the results with those achieved for a reference TiZrNb coating ispresented too.

AB - A series of TiZrNb(V) high entropy alloy-based metallic coatings have been deposited using high-power impulse magnetron sputtering (HiPIMS), with variable V concentrations and constant ratios among the other metals. The coatings were analyzed regarding their composition, surface and cross-sectional morphologies, microstructure, roughness, mechanical properties, oxidation resistance, and thermal stability. The structure of the deposited coatings reveals a transition from the bcc crystal structure to an amorphous phase as the V concentration increases. The addition of V also led to a decrease in roughness Ra and an improvement in adhesion, while it did not affect hardness, which remained at ∼10–11 GPa for all samples. Annealing under a protective atmosphere at 400 °C caused structural ordering, which was followed by an increase in mechanical properties. The purpose of the present paper is, therefore, to present a study on the deposition of TiZrNb coatings with increasing V concentration prepared by HiPIMS and to understand the role of V concentration on their structure, chemical composition, mechanical properties, and oxidation resistance. Comparison of the results with those achieved for a reference TiZrNb coating ispresented too.

U2 - 10.1116/6.0003864

DO - 10.1116/6.0003864

M3 - Article

VL - 42

JO - Journal of Vacuum Science and Technology A

JF - Journal of Vacuum Science and Technology A

SN - 1520-8559

IS - 6

ER -