Fersiynau electronig

Dogfennau

Dangosydd eitem ddigidol (DOI)

  • Jens Richter
    RWTH Aachen University
  • Maziar P. Nezhad
  • Birgit Hadam
    RWTH Aachen University
  • Thomas Taubner
    RWTH Aachen University
  • Joachim Knoch
    RWTH Aachen University
  • Florian Merget
    RWTH Aachen University
  • Alvaro Moscoso-Mártir
    RWTH Aachen University
  • Jeremy Witzens
    RWTH Aachen University
We report on the monolithic integration of a new class of reflown silica microtoroid resonators with silicon nanowaveguides fabricated on top of the silica film. Connectivity with other silicon photonics devices is enabled by inversion of the toroid geometry, defined by etching a circular opening rather than a disk in an undercut silica membrane. Intrinsic quality factors of up to 2 million are achieved and several avenues of process improvement are identified that can help attain the higher quality factors (> 108) that are possible in reflown microtoroids. Moreover, due to the microtoroid being formed by standard microfabrication and post-processing by local laser induced heating, these devices are in principle compatible with monolithic co-fabrication with other electro-optic components
Iaith wreiddiolSaesneg
Tudalennau (o-i)27418-27440
CyfnodolynOptics Express
Cyfrol26
Rhif y cyfnodolyn21
Dyddiad ar-lein cynnar5 Hyd 2018
Dynodwyr Gwrthrych Digidol (DOIs)
StatwsCyhoeddwyd - 15 Hyd 2018

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