TY - JOUR

T1 - High-Q inverted silica microtoroid resonators monolithically integrated into a silicon photonics platform

AU - Richter, Jens

AU - Nezhad, Maziar P.

AU - Hadam, Birgit

AU - Taubner, Thomas

AU - Knoch, Joachim

AU - Merget, Florian

AU - Moscoso-Mártir, Alvaro

AU - Witzens, Jeremy

N1 - European Research Council (ERC) project “Frontiers of Integrated Silicon Nanophotonics in Telecommunications” (279770); Excellence Initiative of the German Federal and State Governments. OSA Open Access

PY - 2018/10/15

Y1 - 2018/10/15

N2 - We report on the monolithic integration of a new class of reflown silica microtoroid resonators with silicon nanowaveguides fabricated on top of the silica film. Connectivity with other silicon photonics devices is enabled by inversion of the toroid geometry, defined by etching a circular opening rather than a disk in an undercut silica membrane. Intrinsic quality factors of up to 2 million are achieved and several avenues of process improvement are identified that can help attain the higher quality factors (> 108) that are possible in reflown microtoroids. Moreover, due to the microtoroid being formed by standard microfabrication and post-processing by local laser induced heating, these devices are in principle compatible with monolithic co-fabrication with other electro-optic components

AB - We report on the monolithic integration of a new class of reflown silica microtoroid resonators with silicon nanowaveguides fabricated on top of the silica film. Connectivity with other silicon photonics devices is enabled by inversion of the toroid geometry, defined by etching a circular opening rather than a disk in an undercut silica membrane. Intrinsic quality factors of up to 2 million are achieved and several avenues of process improvement are identified that can help attain the higher quality factors (> 108) that are possible in reflown microtoroids. Moreover, due to the microtoroid being formed by standard microfabrication and post-processing by local laser induced heating, these devices are in principle compatible with monolithic co-fabrication with other electro-optic components

U2 - 10.1364/OE.26.027418

DO - 10.1364/OE.26.027418

M3 - Article

VL - 26

SP - 27418

EP - 27440

JO - Optics Express

JF - Optics Express

SN - 1094-4087

IS - 21

ER -