Intermodulation distortion in MEMS capacitive switches under high RF power
Allbwn ymchwil: Cyfraniad at gynhadledd › Papur
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2013. 1-3 Papur a gyflwynwyd yn IEEE MTT-S International Microwave Symposium Digest (IMS), Seattle, USA, June 2013.
Allbwn ymchwil: Cyfraniad at gynhadledd › Papur
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T1 - Intermodulation distortion in MEMS capacitive switches under high RF power
AU - Molinero, D.
AU - Luo, X.
AU - Ning, Y.
AU - Palego, C.
AU - Hwang, J.
AU - Goldsmith, C.L.
PY - 2013/6/2
Y1 - 2013/6/2
N2 - ntermodulation distortion in MEMS capacitive switches was analyzed both theoretically and experimentally as a function of tone spacing and RF power. The theory and experiment consistently showed that, under high RF power, additional distortion was caused by self-heating of the switch membrane by the RF power, which decreased the membrane spring constant significantly. The results implied that, well before the input RF power triggers self-actuation, the distortion might increase rapidly to an unacceptable level, so that the power-handling capacity of MEMS capacitive switches would be limited by intermodulation distortion instead of self-actuation.
AB - ntermodulation distortion in MEMS capacitive switches was analyzed both theoretically and experimentally as a function of tone spacing and RF power. The theory and experiment consistently showed that, under high RF power, additional distortion was caused by self-heating of the switch membrane by the RF power, which decreased the membrane spring constant significantly. The results implied that, well before the input RF power triggers self-actuation, the distortion might increase rapidly to an unacceptable level, so that the power-handling capacity of MEMS capacitive switches would be limited by intermodulation distortion instead of self-actuation.
U2 - 10.1109/MWSYM.2013.6697357
DO - 10.1109/MWSYM.2013.6697357
M3 - Paper
SP - 1
EP - 3
T2 - IEEE MTT-S International Microwave Symposium Digest (IMS), Seattle, USA, June 2013
Y2 - 3 January 0001
ER -