Monolithically integrated waveguide-coupled silica microtoroids
Allbwn ymchwil: Cyfraniad at gynhadledd › Papur
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2015. 1-3 Papur a gyflwynwyd yn Opto-Electronics and Communications Conference (OECC), Shanghai, 28 June - 2 July 2015.
Allbwn ymchwil: Cyfraniad at gynhadledd › Papur
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T1 - Monolithically integrated waveguide-coupled silica microtoroids
AU - Nezhad, M.
AU - Richter, J.
AU - Nezhad, M.P.
AU - Witzens, J.
PY - 2015/7/28
Y1 - 2015/7/28
N2 - We report on the design and fabrication of a new type of microtoroid high-Q silica resonators monolithically coupled to on-chip silicon nanowire waveguides. In order to enable monolithic waveguide coupling, the microtoroid geometry is inverted such that the resonator is formed by thermal reflow at the circumference of a hole etched in a suspended SiO2 membrane. This configuration is shown to be conducive to integration with a fully functional Silicon Photonics technology platform.
AB - We report on the design and fabrication of a new type of microtoroid high-Q silica resonators monolithically coupled to on-chip silicon nanowire waveguides. In order to enable monolithic waveguide coupling, the microtoroid geometry is inverted such that the resonator is formed by thermal reflow at the circumference of a hole etched in a suspended SiO2 membrane. This configuration is shown to be conducive to integration with a fully functional Silicon Photonics technology platform.
U2 - 10.1109/OECC.2015.7340232
DO - 10.1109/OECC.2015.7340232
M3 - Paper
SP - 1
EP - 3
T2 - Opto-Electronics and Communications Conference (OECC), Shanghai, 28 June - 2 July 2015
Y2 - 3 January 0001
ER -