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Monolithically integrated waveguide-coupled silica microtoroids

Research output: Contribution to conference › Paper

Standard Standard

Monolithically integrated waveguide-coupled silica microtoroids. / Nezhad, M.; Richter, J.; Nezhad, M.P. et al.
2015. 1-3 Paper presented at Opto-Electronics and Communications Conference (OECC), Shanghai, 28 June - 2 July 2015.

Research output: Contribution to conference › Paper

HarvardHarvard

Nezhad, M, Richter, J, Nezhad, MP & Witzens, J 2015, 'Monolithically integrated waveguide-coupled silica microtoroids', Paper presented at Opto-Electronics and Communications Conference (OECC), Shanghai, 28 June - 2 July 2015, 3/01/01 pp. 1-3. https://doi.org/10.1109/OECC.2015.7340232

APA

Nezhad, M., Richter, J., Nezhad, M. P., & Witzens, J. (2015). Monolithically integrated waveguide-coupled silica microtoroids. 1-3. Paper presented at Opto-Electronics and Communications Conference (OECC), Shanghai, 28 June - 2 July 2015. https://doi.org/10.1109/OECC.2015.7340232

CBE

Nezhad M, Richter J, Nezhad MP, Witzens J. 2015. Monolithically integrated waveguide-coupled silica microtoroids. Paper presented at Opto-Electronics and Communications Conference (OECC), Shanghai, 28 June - 2 July 2015. https://doi.org/10.1109/OECC.2015.7340232

MLA

Nezhad, M. et al. Monolithically integrated waveguide-coupled silica microtoroids. Opto-Electronics and Communications Conference (OECC), Shanghai, 28 June - 2 July 2015, 03 Jan 0001, Paper, 2015. https://doi.org/10.1109/OECC.2015.7340232

VancouverVancouver

Nezhad M, Richter J, Nezhad MP, Witzens J. Monolithically integrated waveguide-coupled silica microtoroids. 2015. Paper presented at Opto-Electronics and Communications Conference (OECC), Shanghai, 28 June - 2 July 2015. doi: 10.1109/OECC.2015.7340232

Author

Nezhad, M. ; Richter, J. ; Nezhad, M.P. et al. / Monolithically integrated waveguide-coupled silica microtoroids. Paper presented at Opto-Electronics and Communications Conference (OECC), Shanghai, 28 June - 2 July 2015.

RIS

TY - CONF

T1 - Monolithically integrated waveguide-coupled silica microtoroids

AU - Nezhad, M.

AU - Richter, J.

AU - Nezhad, M.P.

AU - Witzens, J.

PY - 2015/7/28

Y1 - 2015/7/28

N2 - We report on the design and fabrication of a new type of microtoroid high-Q silica resonators monolithically coupled to on-chip silicon nanowire waveguides. In order to enable monolithic waveguide coupling, the microtoroid geometry is inverted such that the resonator is formed by thermal reflow at the circumference of a hole etched in a suspended SiO2 membrane. This configuration is shown to be conducive to integration with a fully functional Silicon Photonics technology platform.

AB - We report on the design and fabrication of a new type of microtoroid high-Q silica resonators monolithically coupled to on-chip silicon nanowire waveguides. In order to enable monolithic waveguide coupling, the microtoroid geometry is inverted such that the resonator is formed by thermal reflow at the circumference of a hole etched in a suspended SiO2 membrane. This configuration is shown to be conducive to integration with a fully functional Silicon Photonics technology platform.

U2 - 10.1109/OECC.2015.7340232

DO - 10.1109/OECC.2015.7340232

M3 - Paper

SP - 1

EP - 3

T2 - Opto-Electronics and Communications Conference (OECC), Shanghai, 28 June - 2 July 2015

Y2 - 3 January 0001

ER -