TY - CONF

T1 - Pull-in and release transients of MEMS capacitive switches under high RF power

AU - Palego, C.

AU - Molinero, D.

AU - Yaqing Ning, [No Value]

AU - Xi Luo, [No Value]

AU - Hwang, J.C.

AU - Goldsmith, C.L.

PY - 2012/10/29

Y1 - 2012/10/29

N2 - For the first time, both pull-in and release transients were characterized under high RF power levels on electrostatically actuated capacitive switches that exhibited little ambient temperature dependence under small-signal conditions. In spite of the complication of buckling, thermal resistances and time constants were extracted for both pulled-in and released states. In the pulled-in state, the extracted thermal resistance and time constant were approximately 5000°C/W and 40μs, respectively. In the released state, the corresponding values were approximately 3000°C/W and 100μs, respectively. These extracted parameters could serve as the foundation for physical understanding, as well as compact modeling of large-signal transients. They could also help improve the design of switches that are more robust against temperature change and RF loading.

AB - For the first time, both pull-in and release transients were characterized under high RF power levels on electrostatically actuated capacitive switches that exhibited little ambient temperature dependence under small-signal conditions. In spite of the complication of buckling, thermal resistances and time constants were extracted for both pulled-in and released states. In the pulled-in state, the extracted thermal resistance and time constant were approximately 5000°C/W and 40μs, respectively. In the released state, the corresponding values were approximately 3000°C/W and 100μs, respectively. These extracted parameters could serve as the foundation for physical understanding, as well as compact modeling of large-signal transients. They could also help improve the design of switches that are more robust against temperature change and RF loading.

M3 - Paper

SP - 437

EP - 440

T2 - 7th European Microwave Integrated Circuits Conference (EuMIC), Amsterdam, 29-30 October 2012

Y2 - 3 January 0002

ER -