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An alternative method of fabricating sub-micron resolution masks using excimer laser ablation.

Research output: Contribution to journal › Article › peer-review

Standard Standard

An alternative method of fabricating sub-micron resolution masks using excimer laser ablation. / Hayden, C.J.; Eijkel, J.C.; Dalton, C.
In: Journal of Micromechanics and Microengineering, Vol. 14, No. 6, 01.06.2004, p. 826-831.

Research output: Contribution to journal › Article › peer-review

HarvardHarvard

Hayden, CJ, Eijkel, JC & Dalton, C 2004, 'An alternative method of fabricating sub-micron resolution masks using excimer laser ablation.', Journal of Micromechanics and Microengineering, vol. 14, no. 6, pp. 826-831. https://doi.org/10.1088/0960-1317/14/6/010

APA

Hayden, C. J., Eijkel, J. C., & Dalton, C. (2004). An alternative method of fabricating sub-micron resolution masks using excimer laser ablation. Journal of Micromechanics and Microengineering, 14(6), 826-831. https://doi.org/10.1088/0960-1317/14/6/010

CBE

Hayden CJ, Eijkel JC, Dalton C. 2004. An alternative method of fabricating sub-micron resolution masks using excimer laser ablation. Journal of Micromechanics and Microengineering. 14(6):826-831. https://doi.org/10.1088/0960-1317/14/6/010

MLA

Hayden, C.J., J.C. Eijkel and C. Dalton. "An alternative method of fabricating sub-micron resolution masks using excimer laser ablation.". Journal of Micromechanics and Microengineering. 2004, 14(6). 826-831. https://doi.org/10.1088/0960-1317/14/6/010

VancouverVancouver

Hayden CJ, Eijkel JC, Dalton C. An alternative method of fabricating sub-micron resolution masks using excimer laser ablation. Journal of Micromechanics and Microengineering. 2004 Jun 1;14(6):826-831. doi: 10.1088/0960-1317/14/6/010

Author

Hayden, C.J. ; Eijkel, J.C. ; Dalton, C. / An alternative method of fabricating sub-micron resolution masks using excimer laser ablation. In: Journal of Micromechanics and Microengineering. 2004 ; Vol. 14, No. 6. pp. 826-831.

RIS

TY - JOUR

T1 - An alternative method of fabricating sub-micron resolution masks using excimer laser ablation.

AU - Hayden, C.J.

AU - Eijkel, J.C.

AU - Dalton, C.

PY - 2004/6/1

Y1 - 2004/6/1

KW - ENGINEERING

KW - ELECTRICAL & ELECTRONIC

KW - INSTRUMENTS & INSTRUMENTATION

KW - MATERIALS SCIENCE

KW - MULTIDISCIPLINARY

KW - MECHANICS

KW - NANOSCIENCE & NANOTECHNOLOGY

U2 - 10.1088/0960-1317/14/6/010

DO - 10.1088/0960-1317/14/6/010

M3 - Article

VL - 14

SP - 826

EP - 831

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

SN - 0960-1317

IS - 6

ER -