Electronic versions

  • C.J. Hayden
  • J.C. Eijkel
  • C. Dalton

Keywords

  • ENGINEERING, ELECTRICAL & ELECTRONIC, INSTRUMENTS & INSTRUMENTATION, MATERIALS SCIENCE, MULTIDISCIPLINARY, MECHANICS, NANOSCIENCE & NANOTECHNOLOGY
Original languageEnglish
Pages (from-to)826-831
JournalJournal of Micromechanics and Microengineering
Volume14
Issue number6
DOIs
Publication statusPublished - 1 Jun 2004
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