An alternative method of fabricating sub-micron resolution masks using excimer laser ablation.
Research output: Contribution to journal › Article › peer-review
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Keywords
- ENGINEERING, ELECTRICAL & ELECTRONIC, INSTRUMENTS & INSTRUMENTATION, MATERIALS SCIENCE, MULTIDISCIPLINARY, MECHANICS, NANOSCIENCE & NANOTECHNOLOGY
| Original language | English |
|---|---|
| Pages (from-to) | 826-831 |
| Journal | Journal of Micromechanics and Microengineering |
| Volume | 14 |
| Issue number | 6 |
| DOIs | |
| Publication status | Published - 1 Jun 2004 |