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Effect of surface conduction on dielectric charging in RF MEMS capacitive switches

Research output: Contribution to conference › Paper

Standard Standard

Effect of surface conduction on dielectric charging in RF MEMS capacitive switches. / Peng, Z.; Molinero, D.; Palego, C. et al.
2010. 1250-1253 Paper presented at Microwave Symposium Digest (MTT), 2010 IEEE MTT-S International, Anaheim, USA, 23-28 May 2010.

Research output: Contribution to conference › Paper

HarvardHarvard

Peng, Z, Molinero, D, Palego, C, Hwang, J, Moody, C, Malczewski, A & Pillans, BW 2010, 'Effect of surface conduction on dielectric charging in RF MEMS capacitive switches', Paper presented at Microwave Symposium Digest (MTT), 2010 IEEE MTT-S International, Anaheim, USA, 23-28 May 2010, 3/01/01 pp. 1250-1253. https://doi.org/10.1109/MWSYM.2010.5515661

APA

Peng, Z., Molinero, D., Palego, C., Hwang, J., Moody, C., Malczewski, A., & Pillans, B. W. (2010). Effect of surface conduction on dielectric charging in RF MEMS capacitive switches. 1250-1253. Paper presented at Microwave Symposium Digest (MTT), 2010 IEEE MTT-S International, Anaheim, USA, 23-28 May 2010. https://doi.org/10.1109/MWSYM.2010.5515661

CBE

Peng Z, Molinero D, Palego C, Hwang J, Moody C, Malczewski A, Pillans BW. 2010. Effect of surface conduction on dielectric charging in RF MEMS capacitive switches. Paper presented at Microwave Symposium Digest (MTT), 2010 IEEE MTT-S International, Anaheim, USA, 23-28 May 2010. https://doi.org/10.1109/MWSYM.2010.5515661

MLA

Peng, Z. et al. Effect of surface conduction on dielectric charging in RF MEMS capacitive switches. Microwave Symposium Digest (MTT), 2010 IEEE MTT-S International, Anaheim, USA, 23-28 May 2010, 03 Jan 0001, Paper, 2010. https://doi.org/10.1109/MWSYM.2010.5515661

VancouverVancouver

Peng Z, Molinero D, Palego C, Hwang J, Moody C, Malczewski A et al.. Effect of surface conduction on dielectric charging in RF MEMS capacitive switches. 2010. Paper presented at Microwave Symposium Digest (MTT), 2010 IEEE MTT-S International, Anaheim, USA, 23-28 May 2010. doi: 10.1109/MWSYM.2010.5515661

Author

Peng, Z. ; Molinero, D. ; Palego, C. et al. / Effect of surface conduction on dielectric charging in RF MEMS capacitive switches. Paper presented at Microwave Symposium Digest (MTT), 2010 IEEE MTT-S International, Anaheim, USA, 23-28 May 2010.

RIS

TY - CONF

T1 - Effect of surface conduction on dielectric charging in RF MEMS capacitive switches

AU - Peng, Z.

AU - Molinero, D.

AU - Palego, C.

AU - Hwang, J.

AU - Moody, C.

AU - Malczewski, A.

AU - Pillans, B.W.

PY - 2010/5/23

Y1 - 2010/5/23

N2 - Charging of the surface of the dielectric in electrostatically actuated RF MEMS capacitive switches has been shown to be strongly affected by ambient humidity. We now hypothesize that the humidity affects surface charging through enhanced surface conduction. This is confirmed by the experimental results obtained on surface conductivity sensors and RF MEMS capacitive switches fabricated on the same die. The results suggest that it is critical to not only minimize the humidity in the switch package, but also optimize the surface chemistry of the switch dielectric to reduce its surface conductivity.

AB - Charging of the surface of the dielectric in electrostatically actuated RF MEMS capacitive switches has been shown to be strongly affected by ambient humidity. We now hypothesize that the humidity affects surface charging through enhanced surface conduction. This is confirmed by the experimental results obtained on surface conductivity sensors and RF MEMS capacitive switches fabricated on the same die. The results suggest that it is critical to not only minimize the humidity in the switch package, but also optimize the surface chemistry of the switch dielectric to reduce its surface conductivity.

U2 - 10.1109/MWSYM.2010.5515661

DO - 10.1109/MWSYM.2010.5515661

M3 - Paper

SP - 1250

EP - 1253

T2 - Microwave Symposium Digest (MTT), 2010 IEEE MTT-S International, Anaheim, USA, 23-28 May 2010

Y2 - 3 January 0001

ER -