Fabrication of complex 3D structures using Step and Flash Imprint Lithography (S-FIL).
Research output: Contribution to journal › Article › peer-review
Electronic versions
DOI
| Original language | English |
|---|---|
| Pages (from-to) | 853-855 |
| Journal | Microelectronic Engineering |
| Volume | 85 |
| Issue number | 5-6 |
| DOIs | |
| Publication status | Published - 1 May 2008 |