Fabrication of step-and-flash imprint lithography (S-FIL) templates using XeF2 enhanced focused ion-beam ething.
Research output: Contribution to journal › Article › peer-review
Electronic versions
DOI
Keywords
- MATERIALS SCIENCE, MULTIDISCIPLINARY, PHYSICS, APPLIED
| Original language | English |
|---|---|
| Pages (from-to) | 819-825 |
| Journal | Applied Physics A: Materials Science and Processing |
| Volume | 96 |
| Issue number | 4 |
| DOIs | |
| Publication status | Published - 1 Sept 2009 |