Focused ion beam-assisted technology in sub-picolitre micro-dispenser fabrication
Research output: Contribution to journal › Article › peer-review
Electronic versions
DOI
| Original language | English |
|---|---|
| Pages (from-to) | 1-8 |
| Journal | Journal of Micromechanics and Microengineering |
| Volume | 18 |
| Issue number | 7 |
| DOIs | |
| Publication status | Published - 9 Jun 2008 |