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Focused ion beam-assisted technology in sub-picolitre micro-dispenser fabrication

Research output: Contribution to journal › Article › peer-review

Standard Standard

Focused ion beam-assisted technology in sub-picolitre micro-dispenser fabrication. / Campo, E.; Lopez, M.J.; Caballero, D. et al.
In: Journal of Micromechanics and Microengineering, Vol. 18, No. 7, 09.06.2008, p. 1-8.

Research output: Contribution to journal › Article › peer-review

HarvardHarvard

Campo, E, Lopez, MJ, Caballero, D, Campo, EM, Perez-Castillejos, R, Errachid, A, Esteve, J & Plaza, JA 2008, 'Focused ion beam-assisted technology in sub-picolitre micro-dispenser fabrication', Journal of Micromechanics and Microengineering, vol. 18, no. 7, pp. 1-8. https://doi.org/10.1088/0960-1317/18/7/075021

APA

Campo, E., Lopez, M. J., Caballero, D., Campo, E. M., Perez-Castillejos, R., Errachid, A., Esteve, J., & Plaza, J. A. (2008). Focused ion beam-assisted technology in sub-picolitre micro-dispenser fabrication. Journal of Micromechanics and Microengineering, 18(7), 1-8. https://doi.org/10.1088/0960-1317/18/7/075021

CBE

Campo E, Lopez MJ, Caballero D, Campo EM, Perez-Castillejos R, Errachid A, Esteve J, Plaza JA. 2008. Focused ion beam-assisted technology in sub-picolitre micro-dispenser fabrication. Journal of Micromechanics and Microengineering. 18(7):1-8. https://doi.org/10.1088/0960-1317/18/7/075021

MLA

Campo, E. et al. "Focused ion beam-assisted technology in sub-picolitre micro-dispenser fabrication". Journal of Micromechanics and Microengineering. 2008, 18(7). 1-8. https://doi.org/10.1088/0960-1317/18/7/075021

VancouverVancouver

Campo E, Lopez MJ, Caballero D, Campo EM, Perez-Castillejos R, Errachid A et al. Focused ion beam-assisted technology in sub-picolitre micro-dispenser fabrication. Journal of Micromechanics and Microengineering. 2008 Jun 9;18(7):1-8. doi: 10.1088/0960-1317/18/7/075021

Author

Campo, E. ; Lopez, M.J. ; Caballero, D. et al. / Focused ion beam-assisted technology in sub-picolitre micro-dispenser fabrication. In: Journal of Micromechanics and Microengineering. 2008 ; Vol. 18, No. 7. pp. 1-8.

RIS

TY - JOUR

T1 - Focused ion beam-assisted technology in sub-picolitre micro-dispenser fabrication

AU - Campo, E.

AU - Lopez, M.J.

AU - Caballero, D.

AU - Campo, E.M.

AU - Perez-Castillejos, R.

AU - Errachid, A.

AU - Esteve, J.

AU - Plaza, J.A.

PY - 2008/6/9

Y1 - 2008/6/9

U2 - 10.1088/0960-1317/18/7/075021

DO - 10.1088/0960-1317/18/7/075021

M3 - Article

VL - 18

SP - 1

EP - 8

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

SN - 0960-1317

IS - 7

ER -