High-Q inverted silica microtoroid resonators monolithically integrated into a silicon photonics platform
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In: Optics Express, Vol. 26, No. 21, 15.10.2018, p. 27418-27440.
Research output: Contribution to journal › Article › peer-review
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T1 - High-Q inverted silica microtoroid resonators monolithically integrated into a silicon photonics platform
AU - Richter, Jens
AU - Nezhad, Maziar P.
AU - Hadam, Birgit
AU - Taubner, Thomas
AU - Knoch, Joachim
AU - Merget, Florian
AU - Moscoso-Mártir, Alvaro
AU - Witzens, Jeremy
N1 - European Research Council (ERC) project “Frontiers of Integrated Silicon Nanophotonics in Telecommunications” (279770); Excellence Initiative of the German Federal and State Governments. OSA Open Access
PY - 2018/10/15
Y1 - 2018/10/15
N2 - We report on the monolithic integration of a new class of reflown silica microtoroid resonators with silicon nanowaveguides fabricated on top of the silica film. Connectivity with other silicon photonics devices is enabled by inversion of the toroid geometry, defined by etching a circular opening rather than a disk in an undercut silica membrane. Intrinsic quality factors of up to 2 million are achieved and several avenues of process improvement are identified that can help attain the higher quality factors (> 108) that are possible in reflown microtoroids. Moreover, due to the microtoroid being formed by standard microfabrication and post-processing by local laser induced heating, these devices are in principle compatible with monolithic co-fabrication with other electro-optic components
AB - We report on the monolithic integration of a new class of reflown silica microtoroid resonators with silicon nanowaveguides fabricated on top of the silica film. Connectivity with other silicon photonics devices is enabled by inversion of the toroid geometry, defined by etching a circular opening rather than a disk in an undercut silica membrane. Intrinsic quality factors of up to 2 million are achieved and several avenues of process improvement are identified that can help attain the higher quality factors (> 108) that are possible in reflown microtoroids. Moreover, due to the microtoroid being formed by standard microfabrication and post-processing by local laser induced heating, these devices are in principle compatible with monolithic co-fabrication with other electro-optic components
U2 - 10.1364/OE.26.027418
DO - 10.1364/OE.26.027418
M3 - Article
VL - 26
SP - 27418
EP - 27440
JO - Optics Express
JF - Optics Express
SN - 1094-4087
IS - 21
ER -