Low-dispersion metamaterial-based phase shifters with reduced size and number of MEMS switches

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  • V. Gholizadeh
    Lehigh University, Bethlehem, PA
  • M.J. Asadi
    Lehigh University, Bethlehem, PA
  • Y. Ning
    Lehigh University, Bethlehem, PA
  • Cristiano Palego
    Lehigh University, Bethlehem, PA
  • J.C.M. Hwang
    Lehigh University, Bethlehem, PA
  • D. Scarbrough
    MEMtronics Corporation, Richardson, TX
  • C.L. Goldsmith
    MEMtronics Corporation, Richardson, TX
This paper reports a low-dispersion metamaterial-based 3-bit phase shifter which occupies an area of approximately 5 mm2 and uses only six microelectromechanical systems (MEMS) switches. The phase shifter is based on a coplanar slow-wave structure with defected ground and comprises three unit cells of 180°, 90° and 45° phase shifts, respectively. Each unit cell uses two single-pole-single-throw MEMS capacitive switches in series and parallel configurations, respectively, to switch between right-handed (low-pass) and left-handed (high-pass) states for the specified phase shift. Three-dimensional finite-element electromagnetic simulation was used to help optimize the compact layout. The worst-case performance across the band of 24-28 GHz was simulated to have less than 9° root-mean-square phase error, less than 1.7 dB insertion loss, and greater than 13 dB return loss.


  • Phase shifters, Microswitches, Insertion loss, Micromechanical devices, Electrodes, Layout, Capacitance
Original languageEnglish
Title of host publicationWireless Symposium (IWS), 2016 IEEE MTT-S International
Publication statusPublished - 16 Mar 2016
Externally publishedYes
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