Monolithically integrated waveguide-coupled silica microtoroids
Research output: Contribution to conference › Paper
Electronic versions
DOI
We report on the design and fabrication of a new type of microtoroid high-Q silica resonators monolithically coupled to on-chip silicon nanowire waveguides. In order to enable monolithic waveguide coupling, the microtoroid geometry is inverted such that the resonator is formed by thermal reflow at the circumference of a hole etched in a suspended SiO2 membrane. This configuration is shown to be conducive to integration with a fully functional Silicon Photonics technology platform.
| Original language | English |
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| Pages | 1-3 |
| DOIs | |
| Publication status | Published - 28 Jul 2015 |
| Event | Opto-Electronics and Communications Conference (OECC), Shanghai, 28 June - 2 July 2015 - Duration: 3 Jan 0001 → … |
Conference
| Conference | Opto-Electronics and Communications Conference (OECC), Shanghai, 28 June - 2 July 2015 |
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| Period | 3/01/01 → … |