Research Portal

Multiphysics modelling and simulation of dry laser cleaning of micro-slots with particle contaminants

Research output: Contribution to journal › Article › peer-review

Standard Standard

Multiphysics modelling and simulation of dry laser cleaning of micro-slots with particle contaminants. / Yue, Liyang; Wang, Zengbo; Li, Lin.
In: Journal of Physics D: Applied Physics, Vol. 45, No. 13, 12.03.2012, p. 135401.

Research output: Contribution to journal › Article › peer-review

HarvardHarvard

Yue, L, Wang, Z & Li, L 2012, 'Multiphysics modelling and simulation of dry laser cleaning of micro-slots with particle contaminants', Journal of Physics D: Applied Physics, vol. 45, no. 13, pp. 135401. https://doi.org/10.1088/0022-3727/45/13/135401

APA

Yue, L., Wang, Z., & Li, L. (2012). Multiphysics modelling and simulation of dry laser cleaning of micro-slots with particle contaminants. Journal of Physics D: Applied Physics, 45(13), 135401. https://doi.org/10.1088/0022-3727/45/13/135401

CBE

Yue L, Wang Z, Li L. 2012. Multiphysics modelling and simulation of dry laser cleaning of micro-slots with particle contaminants. Journal of Physics D: Applied Physics. 45(13):135401. https://doi.org/10.1088/0022-3727/45/13/135401

MLA

Yue, Liyang, Zengbo Wang and Lin Li. "Multiphysics modelling and simulation of dry laser cleaning of micro-slots with particle contaminants". Journal of Physics D: Applied Physics. 2012, 45(13). 135401. https://doi.org/10.1088/0022-3727/45/13/135401

VancouverVancouver

Yue L, Wang Z, Li L. Multiphysics modelling and simulation of dry laser cleaning of micro-slots with particle contaminants. Journal of Physics D: Applied Physics. 2012 Mar 12;45(13):135401. doi: 10.1088/0022-3727/45/13/135401

Author

Yue, Liyang ; Wang, Zengbo ; Li, Lin. / Multiphysics modelling and simulation of dry laser cleaning of micro-slots with particle contaminants. In: Journal of Physics D: Applied Physics. 2012 ; Vol. 45, No. 13. pp. 135401.

RIS

TY - JOUR

T1 - Multiphysics modelling and simulation of dry laser cleaning of micro-slots with particle contaminants

AU - Yue, Liyang

AU - Wang, Zengbo

AU - Li, Lin

PY - 2012/3/12

Y1 - 2012/3/12

N2 - Light could interact differently with thin-film contaminants and particle contaminates because of their different surface morphologies. In the case of dry laser cleaning of small transparent particles, it is well known that particles could function like mini-lenses, causing a localized near-field hot spot effect on the cleaning process. This paper looks into a special, yet important, phenomenon of dry laser cleaning of particles trapped in micro-sized slots. The effects of slot size, particle size and particle aggregate states in the cleaning process have been theoretically investigated, based on a coupled electromagnetic-thermal-mechanical multiphysics modelling and simulation approach. The study is important for the development and optimization of laser cleaning processes for contamination removal from cracks and slots.

AB - Light could interact differently with thin-film contaminants and particle contaminates because of their different surface morphologies. In the case of dry laser cleaning of small transparent particles, it is well known that particles could function like mini-lenses, causing a localized near-field hot spot effect on the cleaning process. This paper looks into a special, yet important, phenomenon of dry laser cleaning of particles trapped in micro-sized slots. The effects of slot size, particle size and particle aggregate states in the cleaning process have been theoretically investigated, based on a coupled electromagnetic-thermal-mechanical multiphysics modelling and simulation approach. The study is important for the development and optimization of laser cleaning processes for contamination removal from cracks and slots.

U2 - 10.1088/0022-3727/45/13/135401

DO - 10.1088/0022-3727/45/13/135401

M3 - Article

VL - 45

SP - 135401

JO - Journal of Physics D: Applied Physics

JF - Journal of Physics D: Applied Physics

SN - 0022-3727

IS - 13

ER -