Quantum-interferometric optical lithography: Towards arbitrary two-dimensional patterns.
Research output: Contribution to journal › Article › peer-review
Electronic versions
DOI
Keywords
- OPTICS, PHYSICS, ATOMIC, MOLECULAR & CHEMICAL
| Original language | English |
|---|---|
| Pages (from-to) | 063407 |
| Journal | Physical Review A |
| Volume | 63 |
| Issue number | 6 |
| DOIs | |
| Publication status | Published - 1 Jun 2001 |