RF MEMS control of planar microchamber for adaptive biosensing appliations

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Electronic versions

  • C. Palego
  • D. Molinero
  • S. Cunningham
  • A. Morris
  • M. Seth
Integration of radiofrequency micro-electromechanical (RF MEMS) tuning modules into a tested planar microchamber for agile biosensing pursposes is investigated. It is found that present MEMS chips enable enhancement of the achievable sensitivity in common sensing scenarios and without adding to technological complexity, although over a relatively narrow frequency range. Dedicated RF MEMS modules with higher capacitive resolution can be prospectively employed for even more flexible performance.
Original languageEnglish
Publication statusPublished - 6 Oct 2014
EventIEEE European Microwave Conference, Rome, Italy, October 2014 -
Duration: 3 Jan 0001 → …


ConferenceIEEE European Microwave Conference, Rome, Italy, October 2014
Period3/01/01 → …
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