RF MEMS control of planar microchamber for adaptive biosensing appliations
Research output: Contribution to conference › Paper
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2014. 1040-1043 Paper presented at IEEE European Microwave Conference, Rome, Italy, October 2014.
Research output: Contribution to conference › Paper
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T1 - RF MEMS control of planar microchamber for adaptive biosensing appliations
AU - Palego, C.
AU - Molinero, D.
AU - Cunningham, S.
AU - Morris, A.
AU - Seth, M.
PY - 2014/10/6
Y1 - 2014/10/6
N2 - Integration of radiofrequency micro-electromechanical (RF MEMS) tuning modules into a tested planar microchamber for agile biosensing pursposes is investigated. It is found that present MEMS chips enable enhancement of the achievable sensitivity in common sensing scenarios and without adding to technological complexity, although over a relatively narrow frequency range. Dedicated RF MEMS modules with higher capacitive resolution can be prospectively employed for even more flexible performance.
AB - Integration of radiofrequency micro-electromechanical (RF MEMS) tuning modules into a tested planar microchamber for agile biosensing pursposes is investigated. It is found that present MEMS chips enable enhancement of the achievable sensitivity in common sensing scenarios and without adding to technological complexity, although over a relatively narrow frequency range. Dedicated RF MEMS modules with higher capacitive resolution can be prospectively employed for even more flexible performance.
U2 - 10.1109/EuMC.2014.6986616
DO - 10.1109/EuMC.2014.6986616
M3 - Paper
SP - 1040
EP - 1043
T2 - IEEE European Microwave Conference, Rome, Italy, October 2014
Y2 - 3 January 0001
ER -