Robustness of RF MEMS Capacitive Switches With Molybdenum Membranes

Research output: Contribution to journalArticle

Electronic versions

  • Cristiano Palego
    Lehigh University, Bethlehem, PA
  • Jie Deng
    Lehigh University, Bethlehem, PA
  • Zhen Peng
    Lehigh University, Bethlehem, PA
  • Subrata Halder
    Lehigh University, Bethlehem, PA
  • James C. M. Hwang
    Lehigh University, Bethlehem, PA
  • David I. Forehand
    MEMtronics Corporation, Richardson, TX
  • Derek Scarbrough
    MEMtronics Corporation, Richardson, TX
  • Charles L. Goldsmith
    MEMtronics Corporation, Richardson, TX
  • Ian Johnston
    Innovative Micro Technology
  • Suresh K. Sampath
    Innovative Micro Technology
  • Arindom Datta
    Innovative Micro Technology
Original languageEnglish
Pages (from-to)3262-3269
JournalIEEE Transactions on Microwave Theory and Techniques
Volume57
Issue number12
DOIs
Publication statusPublished - 10 Nov 2009
Externally publishedYes
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