Robustness of RF MEMS Capacitive Switches With Molybdenum Membranes
Research output: Contribution to journal › Article › peer-review
Electronic versions
DOI
Original language | English |
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Pages (from-to) | 3262-3269 |
Journal | IEEE Transactions on Microwave Theory and Techniques |
Volume | 57 |
Issue number | 12 |
DOIs | |
Publication status | Published - 10 Nov 2009 |
Externally published | Yes |